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The International Journal of Advanced Manufacturing Technology

08-05-2024 | Original Article

Material removal and tool path ripple error of bonnet polishing using pads with different groove patterns

Authors: Hsuan-Chun Chen, Jyun-Ting Lin, Yu-Hsiang Lo, Chun-Wei Liu

Published in: The International Journal of Advanced Manufacturing Technology

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Abstract

Bonnet polishing, which is a sub-aperture polishing method, is crucial to the production of aspherical lenses. However, sub-aperture polishing generates regular residual periodic ripples, which result in tool path ripple (TPR) error and reduce surface precision. This study investigated the effects of groove patterns in the heads used for bonnet polishing on material removal and the peak-to-valley (PV) and root-mean-square (RMS) error resulting from TPR. The effects of groove pattern (i.e., no groove, annular grooves, or radial grooves) on the tool influence function and TPR error were investigated through simulation and experimentation. Experimentally, the pad with annular grooves achieved the highest material removal rate, which was 56.3% and 14.0% higher on average than those achieved by the pads with no groove and radial grooves, respectively. However, the pad with radial grooves achieved the lowest PV (1.5834 nm) and RMS (0.7487 nm) TPR error, which were respectively 27.8% and 20.4% lower than those achieved by the pad with no groove and 43.3% and 46.0% lower than those achieved by the pad with annular grooves. In summary, annular grooves enhance material removal, and radial grooves improve surface quality.

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Su X, Ji P, Jin Y et al (2019) Simulation and experimental study on form-preserving capability of bonnet polishing for complex freeform surfaces. Precis Eng 60:54–62. https://doi.org/10.1016/j.precisioneng.2019.07.010CrossRef

Ren L, Zhang F, Liao D et al (2018) Theoretical model and experimental analysis of non-uniform material removal during full-aperture polishing. Int J Adv Manuf Technol 101:137–146. https://doi.org/10.1007/s00170-018-2924-7CrossRef

Li J, Huang J, Hua C et al (2019) Design of surface grooves on a polishing pad based on slurry uniform flow. Int J Adv Manuf Technol 103:4795–4803. https://doi.org/10.1007/s00170-019-04026-0CrossRef

Nie X, Li S, Hu H, Li Q (2014) Control of mid-spatial frequency errors considering the pad groove feature in smoothing polishing process. Appl Opt 53:6332–6339. https://doi.org/10.1364/AO.53.006332CrossRef

Belkhir N, Bouzid D, Herold V (2012) Morphological behavior and wear of polyurethane pads used in glass polishing process. Precis Eng 36:641–649. https://doi.org/10.1016/j.precisioneng.2012.05.006CrossRef

Lin Z-C, Wang R-Y (2014) Abrasive removal depth for polishing a sapphire wafer by a cross-patterned polishing pad with different abrasive particle sizes. Int J Adv Manuf Technol 74:25–36. https://doi.org/10.1007/s00170-014-5982-5CrossRef

Yamazaki T, Doi TK, Kurokawa S et al (2012) Development of novel groove patterns for CMP pad. Advanced Materials Research 497:264–267. https://doi.org/10.4028/www.scientific.net/AMR.497.264CrossRef

Lin Z-C, Chen C-C (2010) Distribution of polishing times for a wafer with different patterned polishing pads during CMP and CCMP. Surf Coat Technol 204:3101–3107. https://doi.org/10.1016/j.surfcoat.2010.01.051CrossRef

Rosales-Yeomans D, DeNardis D, Borucki L et al (2008) Analysis of pads with slanted grooves for copper CMP. J Electrochem Soc 155:H750. https://doi.org/10.1149/1.2963345CrossRef

10.

Wei C-C, Horng J-H, Lee A-C, Lin J-F (2011) Analyses and experimental confirmation of removal performance of silicon oxide film in the chemical–mechanical polishing (CMP) process with pattern geometry of concentric groove pads. Wear 270:172–180. https://doi.org/10.1016/j.wear.2010.10.057CrossRef

11.

Fang C, Liu C, Zhao Z et al (2018) Study on geometrical patterns of textured fixed-abrasive pads in sapphire lapping based on trajectory analysis. Precis Eng 53:169–178. https://doi.org/10.1016/j.precisioneng.2018.03.008CrossRef

12.

Chen F, Miao X, Tang Y, Yin S (2017) A review on recent advances in machining methods based on abrasive jet polishing (AJP). Int J Adv Manuf Technol 90:785–799. https://doi.org/10.1007/s00170-016-9405-7CrossRef

13.

Tian J, Liu H, Cheng J et al (2022) Improving the small ball-end magnetorheological polishing efficiency of fused silica workpiece by the promoting effect of water-bath heating and sodium hydroxide addition on polishing velocity and chemical reaction. Int J Adv Manuf Technol 123:645–656. https://doi.org/10.1007/s00170-022-10180-9CrossRef

14.

Sun R, Nozoe A, Nagahashi J et al (2021) Novel highly-efficient and dress-free polishing technique with plasma-assisted surface modification and dressing. Precis Eng 72:224–236. https://doi.org/10.1016/j.precisioneng.2021.05.003CrossRef

15.

Zeng S, Blunt L (2014) An experimental study on the correlation of polishing force and material removal for bonnet polishing of cobalt chrome alloy. Int J Adv Manuf Technol 73:185–193. https://doi.org/10.1007/s00170-014-5801-zCrossRef

16.

Wang C, Yang W, Ye S et al (2014) Restraint of tool path ripple based on the optimization of tool step size for sub-aperture deterministic polishing. Int J Adv Manuf Technol 75:1431–1438. https://doi.org/10.1007/s00170-014-6223-7CrossRef

17.

Lin J, Wang C, Ye H et al (2015) Effect of the tool influence function shape of the semirigid bonnet to the tool path ripple error. Opt Eng 54:115104. https://doi.org/10.1117/1.OE.54.11.115104CrossRef

18.

Feng J, Zhang Y, Rao M et al (2023) An adaptive bonnet polishing approach based on dual-mode contact depth TIF. Int J Adv Manuf Technol 125:2183–2194. https://doi.org/10.1007/s00170-022-10694-2CrossRef

19.

Lu A, Jin T, Guo Z et al (2018) Characterization of the tool influence function in a dual-axis wheel polishing process to achieve high material removal rates. Precis Eng 52:276–290. https://doi.org/10.1016/j.precisioneng.2018.01.003CrossRef

20.

Wang C, Wang Z, Yang X et al (2014) Modeling of the static tool influence function of bonnet polishing based on FEA. Int J Adv Manuf Technol 74:341–349. https://doi.org/10.1007/s00170-014-6004-3CrossRef

21.

Yao Y, Li Q, Ding J et al (2022) Investigation of an influence function model as a self-rotating wheel polishing tool and its application in high-precision optical fabrication. Appl Sci 12:3296. https://doi.org/10.3390/app12073296CrossRef

22.

Feng J, Zhang Y, Lin S, Yin Y (2020) Improving the accuracy of TIF in bonnet polishing based on gaussian process regression. Int J Adv Manuf Technol 110:1941–1953. https://doi.org/10.1007/s00170-020-05917-3CrossRef

23.

Cao Z-C, Cheung CF, Ho LT, Liu MY (2017) Theoretical and experimental investigation of surface generation in swing precess bonnet polishing of complex three-dimensional structured surfaces. Precis Eng 50:361–371. https://doi.org/10.1016/j.precisioneng.2017.06.010CrossRef

24.

Zeng S, Blunt L (2014) Experimental investigation and analytical modelling of the effects of process parameters on material removal rate for bonnet polishing of cobalt chrome alloy. Precis Eng 38:348–355. https://doi.org/10.1016/j.precisioneng.2013.11.005CrossRef

25.

Wang C, Yang W, Wang Z et al (2014) Highly efficient deterministic polishing using a semirigid bonnet. Opt Eng 53:095102. https://doi.org/10.1117/1.OE.53.9.095102CrossRef

26.

Lin JF, Chen S-C, Ouyang YL, Tsai MS (2006) Analysis of the tribological mechanisms arising in the chemical mechanical polishing of copper-film wafers when using a pad with concentric grooves. J Tribol 128:445–459. https://doi.org/10.1115/1.2194913CrossRef

27.

Cho Y, Liu P, Jeon S et al (2022) Simulation and experimental investigation of the radial groove effect on slurry flow in oxide chemical mechanical polishing. Appl Sci 12:4339. https://doi.org/10.3390/app12094339CrossRef

28.

Preston F (1927) The theory and design of plate Glass Polishing machines. J Soc Glass Technol 11:214–256

29.

Li H, Wei Z, Yu G (2009) Study of Weighted Space Deconvolution Algorithm in Computer Controlled Optical surfacing formation. Chin Opt Lett 7:627–631. https://doi.org/10.3788/COL20090707.0627CrossRef

30.

Song J, Yao Y (2015) Material removal model considering influence of curvature radius in bonnet polishing convex surface. Chin J Mech Eng 28:1109–1116. https://doi.org/10.3901/cjme.2015.0923.114CrossRef

31.

Pan R, Hu C, Fan J et al (2023) Study on optimization of the dynamic performance of the robot bonnet polishing system. Int J Adv Manuf Technol 125:4561–4577. https://doi.org/10.1007/s00170-023-10998-xCrossRef

32.

Walker D, Brooks D, King A, Freeman R, Morton R, McCavana G, Kim S et al (2003) The ‘Precessions’ Tooling for Polishing and figuring flat, spherical and Aspheric Surface. Opt Express 11:958–964. https://doi.org/10.1364/OE.11.000958CrossRef

33.

Wang T, Cheng H, Yang H et al (2015) Controlling mid-spatial frequency errors in magnetorheological jet polishing with a simple vertical model. Appl Opt 54:6433. https://doi.org/10.1364/ao.54.006433CrossRef

34.

Zhong B, Deng W, Chen X et al (2021) Frequency division combined machining method to improve polishing efficiency of continuous phase plate by bonnet polishing. Opt Express 29:1597–1597. https://doi.org/10.1364/oe.412678CrossRef

35.

Xie R, Zhao S, Liao D et al (2019) Effects of kinematics and groove parameters on the mid-spatial frequency error of optics induced during full aperture polishing. Precis Eng 57:176–188. https://doi.org/10.1016/j.precisioneng.2019.04.002CrossRef

Title: Material removal and tool path ripple error of bonnet polishing using pads with different groove patterns
Authors: Hsuan-Chun Chen
Jyun-Ting Lin
Yu-Hsiang Lo
Chun-Wei Liu
Publication date: 08-05-2024
Publisher: Springer London
Published in: The International Journal of Advanced Manufacturing Technology
Print ISSN: 0268-3768
Electronic ISSN: 1433-3015
DOI: https://doi.org/10.1007/s00170-024-13686-6

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