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Microsystem Technologies
Erschienen in: Microsystem Technologies 6/2020

13.01.2020 | Technical Paper

A MEMS based Fabry–Pérot accelerometer with high resolution

verfasst von: Minghui Zhao, Kangli Jiang, Hongwu Bai, Hairong Wang, Xueyong Wei

Erschienen in: Microsystem Technologies | Ausgabe 6/2020

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Abstract

Optical MEMS has become exceedingly popular because of its high performance and resistance to electromagnetic interference. A MEMS based Fabry–Pérot accelerometer consisting of a G-shaped mass-spring structure sensing chip, laser diode, cube beam splitter and photo translating system integrated by 3D printed sensor package is investigated. The sensitivity and resolution calibrated by intensity demodulation method are respectively, 183.793 V/g and 300 ng. The results show that the adopted G-shaped cantilever-mass structure sensing chip combined with the Fabry–Pérot interfere technology can obtain good performance, and the 3D printed sensor package makes the interference optical path and accelerometer more robust and portable.
Vorheriger Artikel Investigation of modal properties and layout of elastomer diaphragm tanks in telecommunication satellite
Nächster Artikel Testing of aluminium and its alloys as structural materials for a MEMS switch

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Metadaten
Titel
A MEMS based Fabry–Pérot accelerometer with high resolution
verfasst von
Minghui Zhao
Kangli Jiang
Hongwu Bai
Hairong Wang
Xueyong Wei
Publikationsdatum
13.01.2020
Verlag
Springer Berlin Heidelberg
Erschienen in
Microsystem Technologies / Ausgabe 6/2020
Print ISSN: 0946-7076
Elektronische ISSN: 1432-1858
DOI
https://doi.org/10.1007/s00542-020-04747-3

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