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Microsystem Technologies
Erschienen in: Microsystem Technologies 8/2017

16.06.2016 | Technical Paper

A micro transmission system based on SOI-MEMS technology: improvement and characteristics

verfasst von: Phuc Hong Pham, Lam Bao Dang

Erschienen in: Microsystem Technologies | Ausgabe 8/2017

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Abstract

In this paper, we have improved and developed a micro transmission system (MTS) with combination of the comb-drive actuators, the ratchet mechanism and elastic structures like beams, springs, etc. The MTS has been fabricated by a SOI-MEMS technology using single photo mask. The system is equipped with two parallel ratchet-actuators on both sides, and can stably drive a four-spring micro container with different velocities in proportion to the driving frequencies up to 40 Hz. Our experiments showed that the MTS not only works stably with one container, but also it can drive smoothly four containers at the same time with the applied voltage of 110 V. The results confirmed a higher stability and better loading capacity of the improved system.
Vorheriger Artikel Glass based IDC sensor element for flex loads on MLCCs in PCB manufacturing chain
Nächster Artikel Mechanical design of a novel MEMS resonant sensor for monitoring in-plane magnetic fields

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Metadaten
Titel
A micro transmission system based on SOI-MEMS technology: improvement and characteristics
verfasst von
Phuc Hong Pham
Lam Bao Dang
Publikationsdatum
16.06.2016
Verlag
Springer Berlin Heidelberg
Erschienen in
Microsystem Technologies / Ausgabe 8/2017
Print ISSN: 0946-7076
Elektronische ISSN: 1432-1858
DOI
https://doi.org/10.1007/s00542-016-3017-x

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