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Microsystem Technologies
Erschienen in: Microsystem Technologies 12/2011

01.12.2011 | Technical Paper

A scrape-through piezoelectric MEMS energy harvester with frequency broadband and up-conversion behaviors

verfasst von: Huicong Liu, Cho Jui Tay, Chenggen Quan, Takeshi Kobayashi, Chengkuo Lee

Erschienen in: Microsystem Technologies | Ausgabe 12/2011

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Abstract

We propose a MEMS piezoelectric energy harvester with a wide operating frequency range by incorporating a high-frequency piezoelectric cantilever and a metal base as the top and bottom stoppers with a low-frequency piezoelectric cantilever. Frequency up-conversion of the piezoelectric energy harvester is realized when the low-frequency piezoelectric cantilever impacts and scrapes through the high-frequency piezoelectric cantilever. For an input acceleration of 0.6 g, with top and bottom stopper distances of 0.75 and 1.1 mm, respectively, the operating frequency ranges from 33 to 43 Hz. The output voltage and power up to 95 mV and 94 nW can be achieved. Experimental results indicate that the frequency up-conversion mechanism significantly improves the effective power.
Vorheriger Artikel Effect of residual stress on RF MEMS switch
Nächster Artikel Structural, morphological and micromechanical studies on fly ash reinforced PMMA composites

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Metadaten
Titel
A scrape-through piezoelectric MEMS energy harvester with frequency broadband and up-conversion behaviors
verfasst von
Huicong Liu
Cho Jui Tay
Chenggen Quan
Takeshi Kobayashi
Chengkuo Lee
Publikationsdatum
01.12.2011
Verlag
Springer-Verlag
Erschienen in
Microsystem Technologies / Ausgabe 12/2011
Print ISSN: 0946-7076
Elektronische ISSN: 1432-1858
DOI
https://doi.org/10.1007/s00542-011-1361-4

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