A study of crystallographic phases in non-stoichiometric (oxygen deficiency) indium oxide thin films

Indium oxide is a well-known transparent conductive oxide (TCO) in its stoichiometric composition (In₂O₃). Its electrical and optical properties are strongly influenced by the chemical composition. This work focuses on an experimental investigation of the crystallographic phases in non-stoichiometric (oxygen deficiency) compositions of indium oxide thin films. The thin films were deposited at 300 °C by reactive sputtering of pure indium target at different oxygen gas flow rates on Si substrates. Two different phases are identified only in the non-stoichiometric compositions: metallic indium- and crystalline indium-rich oxide. The metallic indium phase appears as nano-crystals, a few nano-meters in diameter, evenly dispersed and occupies only 1 vol. % of the film. These metallic nano-particles have a negligible effect on the optical transparency and electrical conductivity of the films. The indium-rich oxide (In_xO_y) phase which occupies about 99 vol. % of the film has the bixbyite crystallographic structure and average grain size of about 50 nm. This phase has a pronounced effect on improving the TCO figure-of-merit (FM) relative to stoichiometric crystalline In₂O₃ films due to a higher increase of the electrical conductivity than the decrease of the optical transparency.