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Erschienen in: Journal of Computational Electronics 2/2015

01.06.2015

An analytical 3D model for short-channel effects in undoped FinFETs

verfasst von: Hamdy Abd El Hamid, Benjamin Iñiguez, Valeria Kilchytska, Denis Flandre, Yehea Ismail

Erschienen in: Journal of Computational Electronics | Ausgabe 2/2015

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Abstract

An analytical and scalable model for the threshold voltage in FinFETs has been developed by solving the 3-D Poisson equation using appropriate techniques. The model is also based on a physical analysis of the conduction path. The mobile charge term was considered in the 3-D Poisson’s equation to be solved. The threshold voltage is defined as the gate voltage to obtain a certain threshold charge density. Due to its 3-D basis, the model inherently accounts for short-channel effects, such as the threshold voltage roll-off and the Drain Induced Barrier Lowering effect. A very good agreement with 3-D numerical simulations has been observed.

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Literatur
1.
Zurück zum Zitat Rahman, M.R.: Design and fabrication of tri-gated FinFET. In: Proceedings of the 22nd Annual Microelectronic Engineering Conference (May 2004) Rahman, M.R.: Design and fabrication of tri-gated FinFET. In: Proceedings of the 22nd Annual Microelectronic Engineering Conference (May 2004)
2.
Zurück zum Zitat Hisamoto, D., et al.: FinFET–a self-aligned double-gate MOSFET scalable to 20 nm. IEEE Trans. Electron Devices 47, 2320–2325 (2000)CrossRef Hisamoto, D., et al.: FinFET–a self-aligned double-gate MOSFET scalable to 20 nm. IEEE Trans. Electron Devices 47, 2320–2325 (2000)CrossRef
3.
Zurück zum Zitat Mathew, L. et al.: CMOS vertical multiple independent gate field effect transistor-MIGFET. In: Proceedings of the IEEE International SOI Conference, pp. 187–189 (Oct 2004) Mathew, L. et al.: CMOS vertical multiple independent gate field effect transistor-MIGFET. In: Proceedings of the IEEE International SOI Conference, pp. 187–189 (Oct 2004)
4.
Zurück zum Zitat Lederer, D., Kilchytska, V., Rudenko, T., Collaert, N., Flandre, D., Dixit, A., De Meyer, K., Raskin, J.P.: FinFET analogue characterization from DC to 110 GHz. Solid-State Electron. 49(9), 1488–1496 (2005)CrossRef Lederer, D., Kilchytska, V., Rudenko, T., Collaert, N., Flandre, D., Dixit, A., De Meyer, K., Raskin, J.P.: FinFET analogue characterization from DC to 110 GHz. Solid-State Electron. 49(9), 1488–1496 (2005)CrossRef
5.
Zurück zum Zitat Kim, S.-H., Fossum, J.G., Trivedi, V.P.: Bulk inversion in FinFETs and implied insights on effective gate width. IEEE Trans. Electron Devices 52(9), 1993–1997 (2005)CrossRef Kim, S.-H., Fossum, J.G., Trivedi, V.P.: Bulk inversion in FinFETs and implied insights on effective gate width. IEEE Trans. Electron Devices 52(9), 1993–1997 (2005)CrossRef
6.
Zurück zum Zitat Fasarakis, N., Tsormpatzoglou, A., Tassisa, D.H., Dimitriadis, C.A., Papathanasiou, K., Jomaah, J., Ghibaudo, G.: Analytical unified threshold voltage model of short-channel FinFETs and implementation. Solid-State Electron. 64, 34–41 (2011)CrossRef Fasarakis, N., Tsormpatzoglou, A., Tassisa, D.H., Dimitriadis, C.A., Papathanasiou, K., Jomaah, J., Ghibaudo, G.: Analytical unified threshold voltage model of short-channel FinFETs and implementation. Solid-State Electron. 64, 34–41 (2011)CrossRef
7.
Zurück zum Zitat Kloes, A., Goebel, D., Bosworth, B.T.: Three-dimensional closed-form model for potential barrier in undoped FinFETs resulting in analytical equations for VT and subthreshold slope. IEEE Trans. Electron Devices, 55(12), 3467–3475 (2008) Kloes, A., Goebel, D., Bosworth, B.T.: Three-dimensional closed-form model for potential barrier in undoped FinFETs resulting in analytical equations for VT and subthreshold slope. IEEE Trans. Electron Devices, 55(12), 3467–3475 (2008)
8.
Zurück zum Zitat Tsormpatzoglou, A., Tassis, D.H., Dimitriadis, C.A., Ghibaudo, G., Collaert, N., Pananakakis, G.: Analytical threshold voltage model for lightly doped short channel tri-gate MOSFETs. Solid-State Electron. 56, 31 (2011)CrossRef Tsormpatzoglou, A., Tassis, D.H., Dimitriadis, C.A., Ghibaudo, G., Collaert, N., Pananakakis, G.: Analytical threshold voltage model for lightly doped short channel tri-gate MOSFETs. Solid-State Electron. 56, 31 (2011)CrossRef
9.
Zurück zum Zitat Pei, G., Kedzierski, J., Oldiges, P., Ieong, M., Kan, E.C.-C.: FinFET design considerations based on 3-D simulation and analytical modeling. IEEE Trans. Electron Devices 49(8), 1411–1419 (2002)CrossRef Pei, G., Kedzierski, J., Oldiges, P., Ieong, M., Kan, E.C.-C.: FinFET design considerations based on 3-D simulation and analytical modeling. IEEE Trans. Electron Devices 49(8), 1411–1419 (2002)CrossRef
10.
Zurück zum Zitat Francis, P., Terao, A., Flandre, D., van de Wiele, F.: Modeling of ultrathin double-gate nMOS/SOI transistors. IEEE Trans. Electron Devices 41(5), 715–720 (1994)CrossRef Francis, P., Terao, A., Flandre, D., van de Wiele, F.: Modeling of ultrathin double-gate nMOS/SOI transistors. IEEE Trans. Electron Devices 41(5), 715–720 (1994)CrossRef
11.
Zurück zum Zitat El Hamid, H.A., Iñiguez, B., Roig, J., Kilchytska, V., Flandre, D.: A 3-D analytical physically-based model for the subthreshold swing in undoped FinFETs. IEEE Trans. Electron Devices 54(9), 2487–2496 (2007) El Hamid, H.A., Iñiguez, B., Roig, J., Kilchytska, V., Flandre, D.: A 3-D analytical physically-based model for the subthreshold swing in undoped FinFETs. IEEE Trans. Electron Devices 54(9), 2487–2496 (2007)
12.
Zurück zum Zitat El Hamid, H.A., Iñiguez, B., Roig, J.: Analytical model of the threshold voltage and subthreshold swing of undoped cylindrical gate all around MOSFETs. IEEE Trans. Electron Devices 52(3), 572–579 (2007) El Hamid, H.A., Iñiguez, B., Roig, J.: Analytical model of the threshold voltage and subthreshold swing of undoped cylindrical gate all around MOSFETs. IEEE Trans. Electron Devices 52(3), 572–579 (2007)
13.
Zurück zum Zitat Chen, Q., Agrawal, B., Meindl, J.D.: A comprehensive analytical subthreshold swing model for double-gate MOSFETs. IEEE Trans. Electron Devices 49(6), 1086–1090 (2002)CrossRef Chen, Q., Agrawal, B., Meindl, J.D.: A comprehensive analytical subthreshold swing model for double-gate MOSFETs. IEEE Trans. Electron Devices 49(6), 1086–1090 (2002)CrossRef
14.
Zurück zum Zitat El Hamid, H.A., Iñiguez, B., Jiménez, D., Roig, J., Pallarès, J., Marsal, L.F.: Two-dimensional analytical threshold voltage roll-off and subthreshold swing models for undoped cylindrical gate all around MOSFET. Solid-State Electron. 50(5), 805–812 (2006) El Hamid, H.A., Iñiguez, B., Jiménez, D., Roig, J., Pallarès, J., Marsal, L.F.: Two-dimensional analytical threshold voltage roll-off and subthreshold swing models for undoped cylindrical gate all around MOSFET. Solid-State Electron. 50(5), 805–812 (2006)
Metadaten
Titel
An analytical 3D model for short-channel effects in undoped FinFETs
verfasst von
Hamdy Abd El Hamid
Benjamin Iñiguez
Valeria Kilchytska
Denis Flandre
Yehea Ismail
Publikationsdatum
01.06.2015
Verlag
Springer US
Erschienen in
Journal of Computational Electronics / Ausgabe 2/2015
Print ISSN: 1569-8025
Elektronische ISSN: 1572-8137
DOI
https://doi.org/10.1007/s10825-015-0678-0

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