Shell-body fabrication for micromachines

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Published under licence by IOP Publishing Ltd
, , Citation H Suzuki et al 1995 J. Micromech. Microeng. 5 36 DOI 10.1088/0960-1317/5/1/007

0960-1317/5/1/36

Abstract

The shell body of a 1/1000 scale car was fabricated by numerically controlled NC machining, integrated circuit compatible processing and micro-electro-discharge processing as an experimental model of a micromachine. The gold-plated nickel body is 30 mu m thick, 4.8 mm long, 1.8 mm wide and 1.8 mm high. In the shell body, a 0.7 mm diameter motor is installed. The body powered by the electromagnetic motor runs at the speed of 100 mm/sec. The body and parts are fabricated as a miniature of a full scale model car by those techniques. Those microparts were assembled with a micromanipulator. This demonstration indicates the possibility for complex 3-dimensional machining.

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10.1088/0960-1317/5/1/007