Abstract
We have developed an integrated optical tracking and focusing sensor, which is a chip 1 mm by 0.5 mm. It can travel along guide patterns keeping a certain gap between itself and the guide pattern. It consists of a laser diode, monolithically fabricated photodiodes and microlenses having a graded refractive index distribution in the thickness direction. Experimental results showed that this integrated sensor can be used as a focusing and tracking sensor with sub-micron accuracy.
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