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Numerical and experimental investigations of micro air bearings for micro systems

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Published under licence by IOP Publishing Ltd
, , Citation Qide Zhang and X C Shan 2006 J. Phys.: Conf. Ser. 34 310 DOI 10.1088/1742-6596/34/1/051

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1 Data Storage Institute, DSI Building, (off Kent Ridge Crescent, NUS), Singapore 117608

2 Singapore Institute of Manufacturing Technology, 71 Nanyang Drive, Singapore 638075

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1742-6596/34/1/310

Abstract

The paper investigated performance of air bearing system in a micro device. A parametric study is carried out. The dynamic performance of a very short journal bearing (L/D < 0.1) and thrust bearing is studied. The parameters that affect the performance of the air bearing are discussed. The optimum values of the important parameters are explored, and the stability of the thrust bearing is discussed. The prototype and test result are presented.

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10.1088/1742-6596/34/1/051