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A Novel Micromachined Microwave Power Sensor Using GaAs MMIC Process

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Published under licence by IOP Publishing Ltd
, , Citation Lei Han et al 2006 J. Phys.: Conf. Ser. 34 546 DOI 10.1088/1742-6596/34/1/090

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1 Key Laboratory of MEMS of Ministry of Education, Southeast University, Nanjing, 210096, China

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1742-6596/34/1/546

Abstract

The theory, design, and fabrication of a novel structure for measuring power of microwave signals are presented. The novelty of this sensor is that it measures the microwave power with which is coupled from the CPW line by the MEMS membrane. In this method the signal is available during the power detection. The simulation and process of this sensor are given.

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10.1088/1742-6596/34/1/090