Abstract
Profiles of electron temperature and number density in a negative-ion source are investigated theoretically. Spatial dependence over the magnetic filter region is obtained using the equations of electron flux and electron heat flux that include the effect of interference of forces by the density gradient and temperature gradient. Due to the effect of the magnetic filter, temperature and density of the electron decrease from the source chamber to the extraction chamber, and the decrease depends on the magnitude of the magnetic flux. The effect of the magnetic filter on the production and destruction rates of the negative hydrogen ion is examined. The reaction rate for the dissociative attachment reaction which produces the negative hydrogen ion increases with the decrease of the electron temperature. However, the production rate per one vibrationally excited hydrogen molecule decreases with the decrease of electron density. On the other hand, the destruction probability of the negative ion by the electron detachment reaction decreases significantly by the decrease of the electron density and temperature. The magnetic filter does not enhance the production of the negative hydrogen ion, but it reduces the destruction of the negative ion because of the decrease of the electron density.