A Matching Technique to Inject Microwave Power into High-Density Plasmas

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Copyright (c) 1969 The Japan Society of Applied Physics
, , Citation Susumu Takeda et al 1969 Jpn. J. Appl. Phys. 8 966 DOI 10.1143/JJAP.8.966

1347-4065/8/7/966

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