A Matching Technique to Inject Microwave Power into High-Density Plasmas
Susumu Takeda1, Shozaburo Kameda1 and Kazuo Minami1
Copyright (c) 1969 The Japan Society of Applied Physics
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Citation Susumu Takeda et al 1969 Jpn. J. Appl. Phys. 8 966
DOI 10.1143/JJAP.8.966
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