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2019 | OriginalPaper | Buchkapitel

15. Atom-Probe Tomography

verfasst von : Thomas F. Kelly

Erschienen in: Springer Handbook of Microscopy

Verlag: Springer International Publishing

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Abstract

This chapter provides an overview of the current state of atom-probe tomography (). The history of APT is recounted so that the reader may put the many modern developments in context. It is noted that atom-probe tomography has the highest spatial resolution among analytical techniques (\({\mathrm{0.2}}\,{\mathrm{nm}}\)), and it has the highest absolute analytical sensitivity (single atoms), a unique combination. The fundamentals of APT, including the operative physics, performance metrics, and hardware configurations, are discussed. Before examining the many benefits that may be realized in APT, however, its limitations such as image distortions and specimen failures are discussed in full. Specimen preparation procedures for most materials are explained. A comprehensive overview of the many materials applications including metals, ceramics, semiconductors, and organics is provided. Finally, there is a look toward the future to see where the technique is headed.

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Zurück zum Zitat T.J. Prosa, M. Greene, T.F. Kelly, J. Fu, K. Narayan, S. Subramaniam: Atom probe tomography of mammalian cells: Advances in specimen preparation, Microsc. Microanal. 16, 482–483 (2010) T.J. Prosa, M. Greene, T.F. Kelly, J. Fu, K. Narayan, S. Subramaniam: Atom probe tomography of mammalian cells: Advances in specimen preparation, Microsc. Microanal. 16, 482–483 (2010)
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Zurück zum Zitat T.F. Kelly, M.K. Miller, K. Rajan, S.P. Ringer, A.Y. Borisevich, N. Dellby, O.L. Krivanek: Toward atomic-scale tomography: The ATOM project, Microsc. Microanal. 17(S2), 708–709 (2011) T.F. Kelly, M.K. Miller, K. Rajan, S.P. Ringer, A.Y. Borisevich, N. Dellby, O.L. Krivanek: Toward atomic-scale tomography: The ATOM project, Microsc. Microanal. 17(S2), 708–709 (2011)
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Zurück zum Zitat T.C. Petersen, S.P. Ringer: An electron tomography algorithm for reconstructing 3-D morphology using surface tangents of projected scattering interfaces, Comput. Phys. Commun. 181, 676–682 (2010) T.C. Petersen, S.P. Ringer: An electron tomography algorithm for reconstructing 3-D morphology using surface tangents of projected scattering interfaces, Comput. Phys. Commun. 181, 676–682 (2010)
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Zurück zum Zitat D. Haley, P.A.J. Bagot, M.P. Moody: Extending continuum models for atom probe simulation, Mater. Charact. 146, 299–306 (2018) D. Haley, P.A.J. Bagot, M.P. Moody: Extending continuum models for atom probe simulation, Mater. Charact. 146, 299–306 (2018)
Metadaten
Titel
Atom-Probe Tomography
verfasst von
Thomas F. Kelly
Copyright-Jahr
2019
Verlag
Springer International Publishing
DOI
https://doi.org/10.1007/978-3-030-00069-1_15

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