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Erschienen in:
AlN Thin Film Processing and Basic Properties Kapitel lesen Erstes Kapitel lesen

2017 | OriginalPaper | Buchkapitel

8. BAW Piezoelectric Resonators

verfasst von : Ken-ya Hashimoto

Erschienen in: Piezoelectric MEMS Resonators

Verlag: Springer International Publishing

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Abstract

This chapter describes basic properties and modeling of resonators using acoustic waves propagating in a solid body. This type of waves is called the bulk acoustic wave (BAW), which can be excited and detected efficiently using piezoelectricity. The resonators are widely used in various applications such as clock generation, frequency filtering, and sensing. The most popular ones are crystal quartz resonators [1] for relatively low frequency applications (<100 MHz). Recently BAW resonators fabricated by thin film and micromachining technologies, i.e., film bulk acoustic resonators (FBARs) [2], are getting popular for relatively high frequency applications (>1–3 GHz) such as duplexers used in mobile and smart phones.

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Vorheriges Kapitel Laterally Vibrating Piezoelectric MEMS Resonators
Nächstes Kapitel Shear Piezoelectric MEMS Resonators
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Metadaten
Titel
BAW Piezoelectric Resonators
verfasst von
Ken-ya Hashimoto
Copyright-Jahr
2017
Buch
Piezoelectric MEMS Resonators

Print ISBN: 978-3-319-28686-0

Electronic ISBN: 978-3-319-28688-4

Copyright-Jahr: 2017

DOI
https://doi.org/10.1007/978-3-319-28688-4_8

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