2006 | OriginalPaper | Buchkapitel
Biomedical Systems
verfasst von : Whye-Kei Lye, Michael Reed
Erschienen in: MEMS: A Practical Guide to Design, Analysis, and Applications
Verlag: Springer Berlin Heidelberg
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The phenomenal success and widespread proliferation of microelectronic devices can be attributed in large part to the mass production technologies that have been developed for their manufacture. These microfabrication techniques have been honed to maximize device yield and microelectromechanical systems (MEMS) capitalize on these semiconductor microfabrication tools to create miniature systems that meld electronic and mechanical functions. Miniaturization brings with it the benefits of smaller devices that cost less, require less power, and incorporate greater functionality. The use of microsystems in biomedical applications holds the promise of improving patient care in a minimally invasive manner while simultaneously reducing health care costs.