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Erschienen in: Microsystem Technologies 1/2018

13.10.2017 | Technical Paper

C-band optical filters with micromechanical tuning

verfasst von: Dooyoung Hah

Erschienen in: Microsystem Technologies | Ausgabe 1/2018

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Abstract

Tunable optical filters that cover the entire range of the C-band (1530–565 nm) are designed by utilizing the Vernier effect, i.e. series coupling of microring resonators of different sizes, and the micromechanical tuning method. The micromechanical tuning method employs lateral comb-drive actuators to control evanescent coupling between the resonators and index modulators. Single crystalline silicon is used as the material for all of the main components including bus waveguide cores, resonators, index modulators, and comb-drive actuators. A finite-difference time-domain method is used for optical analysis of the filter. The simulation results show good agreement with those by analytical methods, previously reported. The width of the index modulator is found to play an important role to the filter characteristics. A wider modulator (e.g., width: 100 nm) can cover the full tuning range of 35 nm without switching among different bands owing to stronger effective index change effect, but induces significant loss to the filter, especially when it is brought close to the resonator. While a narrow modulator (e.g., width: 50 nm), on the other hand, induces moderate loss to the filter, it requires hopping among multiple bands to cover the full range since the effective index change incurred is again moderate. In order to achieve linear tuning characteristics in the cascaded-resonator filters, the shaped-finger comb-drive actuator design method is applied. The design method based on two-dimensional slice approximation is further examined by three-dimensional finite element analysis for verification. It is shown that the design method can also work for the cascaded-resonator filters, even for the one that requires band hopping. Effects of fabrication imperfections to the designed device characteristics are studied as well.

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Literatur
Zurück zum Zitat Choi SJ, Peng Z, Yang Q, Choi SJ, Dapkus PD (2005) Tunable narrow linewidth all-buried heterostructure ring resonator filters using Vernier effects. Photon Technol Lett 17:206–208. doi:10.1109/LPT.2004.838626 Choi SJ, Peng Z, Yang Q, Choi SJ, Dapkus PD (2005) Tunable narrow linewidth all-buried heterostructure ring resonator filters using Vernier effects. Photon Technol Lett 17:206–208. doi:10.​1109/​LPT.​2004.​838626
Zurück zum Zitat Chollet F, De Labachelerie M, Fujita H (1999) Compact evanescent optical switch and attenuator with electromechanical actuation. J Sel Top Quantum Electron 5:52–59. doi:10.1109/2944.748105 CrossRef Chollet F, De Labachelerie M, Fujita H (1999) Compact evanescent optical switch and attenuator with electromechanical actuation. J Sel Top Quantum Electron 5:52–59. doi:10.​1109/​2944.​748105 CrossRef
Zurück zum Zitat Fegadolli WS, Vargas G, Wang X, Valini F, Barea LA, Oliveira JE, Frateschi N, Scherer A, Almeida VR, Panepucci RR (2012) Reconfigurable silicon thermo-optical ring resonator switch based on Vernier effect control. Opt Express 20:14722–14733. doi:10.1364/OE.20.014722 CrossRef Fegadolli WS, Vargas G, Wang X, Valini F, Barea LA, Oliveira JE, Frateschi N, Scherer A, Almeida VR, Panepucci RR (2012) Reconfigurable silicon thermo-optical ring resonator switch based on Vernier effect control. Opt Express 20:14722–14733. doi:10.​1364/​OE.​20.​014722 CrossRef
Zurück zum Zitat Goebuchi Y, Kato T, Kokubun Y (2006) Fast and stable wavelength-selective switch using double-series coupled dielectric microring resonator. Photon Technol Lett. doi:10.1109/LPT.2005.863988 Goebuchi Y, Kato T, Kokubun Y (2006) Fast and stable wavelength-selective switch using double-series coupled dielectric microring resonator. Photon Technol Lett. doi:10.​1109/​LPT.​2005.​863988
Zurück zum Zitat Grover R, Van V, Ibrahim TA, Absil PP, Calhoun LC, Johnson FG, Hryniewicz JV, Ho PT (2002) Parallel-cascaded semiconductor microring resonators for high-order and wide-FSR filters. J Lightwave Technol 20:900–905. doi:10.1109/JLT.2002.1007947 CrossRef Grover R, Van V, Ibrahim TA, Absil PP, Calhoun LC, Johnson FG, Hryniewicz JV, Ho PT (2002) Parallel-cascaded semiconductor microring resonators for high-order and wide-FSR filters. J Lightwave Technol 20:900–905. doi:10.​1109/​JLT.​2002.​1007947 CrossRef
Zurück zum Zitat Hah D (2016) Design of wide-band tunable optical filters with cascaded microring resonators and shaped-finger comb-drive actuators. In: Proceedings of International Symposium on Design, Test, Integration and Packaging of MEMS and MOEMS, pp 276–280 Hah D (2016) Design of wide-band tunable optical filters with cascaded microring resonators and shaped-finger comb-drive actuators. In: Proceedings of International Symposium on Design, Test, Integration and Packaging of MEMS and MOEMS, pp 276–280
Zurück zum Zitat Hah D, Bordelon J (2015) Design of mechanically tunable optical filters with microring resonators. In: Proceedings of International Symposium on Design, Test, Integration and Packaging of MEMS and MOEMS, pp 228–231. doi:10.1109/DTIP.2015.7161007 Hah D, Bordelon J (2015) Design of mechanically tunable optical filters with microring resonators. In: Proceedings of International Symposium on Design, Test, Integration and Packaging of MEMS and MOEMS, pp 228–231. doi:10.​1109/​DTIP.​2015.​7161007
Zurück zum Zitat Haronian D (1998) Geometrical modulation-based interferometry for displacement sensing using optically coupled suspended waveguides. J Microelectromech Syst 7:309–314. doi:10.1109/84.709649 CrossRef Haronian D (1998) Geometrical modulation-based interferometry for displacement sensing using optically coupled suspended waveguides. J Microelectromech Syst 7:309–314. doi:10.​1109/​84.​709649 CrossRef
Zurück zum Zitat Ikeda T, Hane K (2013) A microelectromechanically tunable microring resonator composed of freestanding silicon photonic waveguide couplers. Appl Phys Lett 102:221113. doi:10.1063/1.4809733 CrossRef Ikeda T, Hane K (2013) A microelectromechanically tunable microring resonator composed of freestanding silicon photonic waveguide couplers. Appl Phys Lett 102:221113. doi:10.​1063/​1.​4809733 CrossRef
Zurück zum Zitat Jayatilleka H, Boeck R, Murray K, Flueckiger J, Chrostowski L, Jaeger NA, Shekhar S (2016) Automatic wavelength tuning of series-coupled Vernier racetrack resonators on SOI. In: Proceedings of Optical Fiber Communication Conference, Th3J-5. doi:10.1364/OFC.2016.Th3J.5 Jayatilleka H, Boeck R, Murray K, Flueckiger J, Chrostowski L, Jaeger NA, Shekhar S (2016) Automatic wavelength tuning of series-coupled Vernier racetrack resonators on SOI. In: Proceedings of Optical Fiber Communication Conference, Th3J-5. doi:10.​1364/​OFC.​2016.​Th3J.​5
Zurück zum Zitat Kaminow IP, Iannone PP, Stone J, Stulz LW (1988) FDMA-FSK star network with a tunable optical filter demultiplexer. J Lightwave Technol 6:1406–1414. doi:10.1109/50.7890 CrossRef Kaminow IP, Iannone PP, Stone J, Stulz LW (1988) FDMA-FSK star network with a tunable optical filter demultiplexer. J Lightwave Technol 6:1406–1414. doi:10.​1109/​50.​7890 CrossRef
Zurück zum Zitat Kauppinen LJ, Abdulla SMC, Dijkstra M, de Boer MJ, Berenschot E, Krijnen GJM, Pollnau M, de Ridder RM (2011) Micromechanically tuned ring resonator in silicon on insulator. Opt Lett 36:1047–1049. doi:10.1364/OL.36.001047 CrossRef Kauppinen LJ, Abdulla SMC, Dijkstra M, de Boer MJ, Berenschot E, Krijnen GJM, Pollnau M, de Ridder RM (2011) Micromechanically tuned ring resonator in silicon on insulator. Opt Lett 36:1047–1049. doi:10.​1364/​OL.​36.​001047 CrossRef
Zurück zum Zitat Prabhathan P, Jing Z, Murukeshan VM, Huijuan Z, Shiyi C (2012) Discrete and fine wavelength tunable thermo-optic WSS for low power consumption C + L band tunability. Photon Technol Lett 24:152–154. doi:10.1109/LPT.2011.2174979 CrossRef Prabhathan P, Jing Z, Murukeshan VM, Huijuan Z, Shiyi C (2012) Discrete and fine wavelength tunable thermo-optic WSS for low power consumption C + L band tunability. Photon Technol Lett 24:152–154. doi:10.​1109/​LPT.​2011.​2174979 CrossRef
Zurück zum Zitat Ribot H, Sansonetti P, Carenco A (1990) Improved design for the monolithic integration of a laser and an optical waveguide coupled by an evanescent field. IEEE J Quantum Electron 26:1930–1941. doi:10.1109/3.62112 CrossRef Ribot H, Sansonetti P, Carenco A (1990) Improved design for the monolithic integration of a laser and an optical waveguide coupled by an evanescent field. IEEE J Quantum Electron 26:1930–1941. doi:10.​1109/​3.​62112 CrossRef
Zurück zum Zitat Shoman H, Dhalem MS (2014) Electrically-actuated cantilever for planar evanescent tuning of microring resonators in SOI platforms. Proc Int Conf Opt MEMS Nanophotonics. doi:10.1109/OMN.2014.6924561 Shoman H, Dhalem MS (2014) Electrically-actuated cantilever for planar evanescent tuning of microring resonators in SOI platforms. Proc Int Conf Opt MEMS Nanophotonics. doi:10.​1109/​OMN.​2014.​6924561
Zurück zum Zitat Toshiyoshi H, Piyawattanametha W, Chan CT, Wu MC (2001) Linearization of electrostatically actuated surface micromachined 2-D optical scanner. J Microelectromech Syst 10:205–214. doi:10.1109/84.925744 CrossRef Toshiyoshi H, Piyawattanametha W, Chan CT, Wu MC (2001) Linearization of electrostatically actuated surface micromachined 2-D optical scanner. J Microelectromech Syst 10:205–214. doi:10.​1109/​84.​925744 CrossRef
Zurück zum Zitat Van V, Absil PP, Hryniewicz JV, Ho PT (2001) Propagation loss in single-mode GaAs–AlGaAs microring resonators: measurement and model. J Lightwave Technol 19:1734–1739. doi:10.1109/50.964074 CrossRef Van V, Absil PP, Hryniewicz JV, Ho PT (2001) Propagation loss in single-mode GaAs–AlGaAs microring resonators: measurement and model. J Lightwave Technol 19:1734–1739. doi:10.​1109/​50.​964074 CrossRef
Zurück zum Zitat Yanagase Y, Suzuki S, Kokubun Y, Chu ST (2002) Box-like filter response and expansion of FSR by a vertically triple coupled microring resonator filter. J Lightwave Technol 20:1525–1529. doi:10.1109/JLT.2002.800296 CrossRef Yanagase Y, Suzuki S, Kokubun Y, Chu ST (2002) Box-like filter response and expansion of FSR by a vertically triple coupled microring resonator filter. J Lightwave Technol 20:1525–1529. doi:10.​1109/​JLT.​2002.​800296 CrossRef
Zurück zum Zitat Ye W, Mukherjee S, MacDonald NC (1998) Optimal shape design of an electrostatic comb drive in microelectromechanical systems. J Microelectromech Syst 7:16–26. doi:10.1109/84.661380 CrossRef Ye W, Mukherjee S, MacDonald NC (1998) Optimal shape design of an electrostatic comb drive in microelectromechanical systems. J Microelectromech Syst 7:16–26. doi:10.​1109/​84.​661380 CrossRef
Metadaten
Titel
C-band optical filters with micromechanical tuning
verfasst von
Dooyoung Hah
Publikationsdatum
13.10.2017
Verlag
Springer Berlin Heidelberg
Erschienen in
Microsystem Technologies / Ausgabe 1/2018
Print ISSN: 0946-7076
Elektronische ISSN: 1432-1858
DOI
https://doi.org/10.1007/s00542-017-3576-5

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