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Erschienen in:
Simple Alkoxide Based Precursor Systems Kapitel lesen Erstes Kapitel lesen

2013 | OriginalPaper | Buchkapitel

2. Carboxylate Based Precursor Systems

verfasst von : Theodor Schneller, David Griesche

Erschienen in: Chemical Solution Deposition of Functional Oxide Thin Films

Verlag: Springer Vienna

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Abstract

In this chapter a short review about carboxylate based precursor systems for chemical solution deposition of thin films is presented. First, an introduction into the chemical characteristics of carboxylic acids as well as preparation methods for metal carboxylates is given. Subsequently the MOD (metallo-organic decomposition) concept, which is largely dependent on the use of metal carboxylates is introduced. Important aspects of this method such as deposition, solvent evaporation behavior, and thermal treatment will be discussed. Special emphasis will be given to the decomposition behavior of relevant long- and short chain metal carboxylates, i.e. metal soaps, acetates and propionates. The decomposition of these compounds will be characterized by looking at the degradation mechanisms, intermediate forming and the resulting products. Selected established MOD-routes which are based on these educts are presented and the properties of the resulting layers are described. The last part will be on some basics of the MOD concept for producing superconducting thin films from fluorinated carboxylates.

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Vorheriges Kapitel Simple Alkoxide Based Precursor Systems
Nächstes Kapitel Mixed Metallo-organic Precursor Systems
Fußnoten
1
In the literature the phrase “metal organic deposition” is also often used. It denotes the same kind of precursor chemistry.
 
2
It has to be noted, that there is also brookite as third modification possible, which however occurs less frequently in CSD processes.
 
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Metadaten
Titel
Carboxylate Based Precursor Systems
verfasst von
Theodor Schneller
David Griesche
Copyright-Jahr
2013
Verlag
Springer Vienna
Buch
Chemical Solution Deposition of Functional Oxide Thin Films

Print ISBN: 978-3-211-99310-1

Electronic ISBN: 978-3-211-99311-8

Copyright-Jahr: 2013

DOI
https://doi.org/10.1007/978-3-211-99311-8_2

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