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Thin Film Deposition Techniques (PVD)

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Spin Electronics

Part of the book series: Lecture Notes in Physics ((LNP,volume 569))

Abstract

The most interesting materials for spin electronic devices are thin films of magnetic transition metals and magnetic perovskites, mainly the doped La-manganites [1] as well as several oxides and metals for passivating and contacting the magnetic films. The most suitable methods for the preparation of such films are the physical vapor deposition methods (PVD). Therefore this report will be restricted to these deposition methods.

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Author information

Authors and Affiliations

  1. Institut für Physikalische Hochtechnologie Jena e.V., Winzerlaer Strasse 10, D 07745, Jena, Germany

    E. Steinbeiss

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  1. E. Steinbeiss
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Editor information

Editors and Affiliations

  1. Dept.of Superconductivity and Magnetism, University of Leipzig, Linnestrasse 5, 04103, Leipzig, Germany

    Michael Ziese

  2. Clarendon Laboratory, Oxford University, Parks Road, 3PU OX1, Oxford, UK

    Martin J. Thornton

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© 2001 Springer-Verlag Berlin Heidelberg

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Steinbeiss, E. (2001). Thin Film Deposition Techniques (PVD). In: Ziese, M., Thornton, M.J. (eds) Spin Electronics. Lecture Notes in Physics, vol 569. Springer, Berlin, Heidelberg. https://doi.org/10.1007/3-540-45258-3_13

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  • DOI: https://doi.org/10.1007/3-540-45258-3_13

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  • Publisher Name: Springer, Berlin, Heidelberg

  • Print ISBN: 978-3-540-41804-7

  • Online ISBN: 978-3-540-45258-4

  • eBook Packages: Springer Book Archive

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