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Micro— and Nanofabrication Techniques

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Spin Electronics

Part of the book series: Lecture Notes in Physics ((LNP,volume 569))

Abstract

This chapter is intended to give readers a brief overview of the numerous techniques involved in the fabrication of small magnetic devices.

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Author information

Authors and Affiliations

  1. Service de Physique l’ État Condensé, CEA-Saclay, 91191, Gif/Yvette, France

    C. Fermon

Authors
  1. C. Fermon
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Editor information

Editors and Affiliations

  1. Dept.of Superconductivity and Magnetism, University of Leipzig, Linnestrasse 5, 04103, Leipzig, Germany

    Michael Ziese

  2. Clarendon Laboratory, Oxford University, Parks Road, 3PU OX1, Oxford, UK

    Martin J. Thornton

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© 2001 Springer-Verlag Berlin Heidelberg

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Fermon, C. (2001). Micro— and Nanofabrication Techniques. In: Ziese, M., Thornton, M.J. (eds) Spin Electronics. Lecture Notes in Physics, vol 569. Springer, Berlin, Heidelberg. https://doi.org/10.1007/3-540-45258-3_16

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  • DOI: https://doi.org/10.1007/3-540-45258-3_16

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  • Publisher Name: Springer, Berlin, Heidelberg

  • Print ISBN: 978-3-540-41804-7

  • Online ISBN: 978-3-540-45258-4

  • eBook Packages: Springer Book Archive

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