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Erschienen in:
Tip-Based Nanofabrication for NEMS Devices Kapitel lesen Erstes Kapitel lesen

2022 | OriginalPaper | Buchkapitel

4. Composite Micro-Machining Technology on the Non-Silicon MEMS

verfasst von : Yunna Sun, Guifu Ding, Yan Wang, Zhuoqing Yang

Erschienen in: Advanced MEMS/NEMS Fabrication and Sensors

Verlag: Springer International Publishing

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Abstract

Diversified non-silicon-based micro/nano-fabrication technology (NSMFT/NSNFT), including a variety of high-performance materials, fabrication technologies, device design and test schemes, and microelectromechanical systems (MEMS) devices, is promising in broadening the versatile applications, enhancing the performance, and reducing the process difficulty of MEMS. Therefore, NSMFT/NSNFT has spread widely and attracted worldwide attention. Moreover, NSMFT/NSNFT breaks through the limitation of the single silicon substrate on the design and fabrication of MEMS device. By introducing the diversified non-silicon materials into MEMS, the performance and application of the MEMS system are greatly enhanced and broadened. This review systematically presents the recent fabrication technology and non-silicon materials of NSMFT/NSNFT. Alongside, the design and fabrication of some representative non-silicon-based MEMS devices based on NSMFT/NSNFT are overviewed, and the related performance test systems are also discussed in detail.

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Vorheriges Kapitel Micromachining Based on Mask-Free Direct Writing: An Advanced Approach to Innovative MEMS Gas Sensors
Nächstes Kapitel Nano-in-Nano Integration Technology for Advanced Fabrication of Functional Nanofluidic Devices
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Metadaten
Titel
Composite Micro-Machining Technology on the Non-Silicon MEMS
verfasst von
Yunna Sun
Guifu Ding
Yan Wang
Zhuoqing Yang
Copyright-Jahr
2022
Buch
Advanced MEMS/NEMS Fabrication and Sensors

Print ISBN: 978-3-030-79748-5

Electronic ISBN: 978-3-030-79749-2

Copyright-Jahr: 2022

DOI
https://doi.org/10.1007/978-3-030-79749-2_4

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