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1982 | OriginalPaper | Buchkapitel

Computer Peak Identification and Evaluation of SIMS Spectra

verfasst von : J. Antal, S. Kugler, M. Riedel

Erschienen in: Secondary Ion Mass Spectrometry SIMS III

Verlag: Springer Berlin Heidelberg

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The most important problems in computer peak identification and evaluation of SIMS spectra of multicomponent systems are: (i)to find the possible ion species: (“variables”) atomic, cluster and molecule ions(ii)the determination of the total isotopic currents of these species(iii)the reliability of the identification and evaluation process.

Metadaten
Titel
Computer Peak Identification and Evaluation of SIMS Spectra
verfasst von
J. Antal
S. Kugler
M. Riedel
Copyright-Jahr
1982
Verlag
Springer Berlin Heidelberg
DOI
https://doi.org/10.1007/978-3-642-88152-7_45