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Erschienen in:
1996 | OriginalPaper | Buchkapitel
Contamination-Defect-Fault (CDF) Simulation
verfasst von : Jitendra B. Khare, Wojciech Maly
Erschienen in: From Contamination to Defects, Faults and Yield Loss
Verlag: Springer US
Enthalten in: Professional Book Archive
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As indicated in Chapter 2, the main shortcoming of the disk model was its inability to model faults starting from the actual failure mechanism, rather than from the spot defect level. It was also observed in the model validation experiment [1], [2], [3] and in the experiment described in [4] that most failures in ICs were caused by contamination which deposited on the IC during some processing step. To increase the fidelity of modeling, therefore, it is essential to begin all fault and yield model studies/simulations at the contamination level.