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2017 | OriginalPaper | Buchkapitel

Control of a Magnet-Driven Nano Positioning Stage with Long Stroke Based on Disturbance Observer

verfasst von : Letong Ma, Xixian Mo, Bo Zhang, Han Ding

Erschienen in: Intelligent Robotics and Applications

Verlag: Springer International Publishing

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Abstract

In this paper, a proportional-derivative (PD) controller combined with a disturbance observer is adopted for a designed magnet-driven nano positioning stage. Firstly, the magnet-driven positioning stage with long stroke and nano positioning accuracy is introduced in detail. The stage adopts air bearings to eliminate complicated nonlinear friction effect. The actuator of the stage is a permanent magnet synchronous linear motor which uses ironless windings to eliminate the cogging force and attenuate the reluctance force. Then, a PD controller combined with a disturbance observer is used to control the stage. The validation experiment is carried out based on Matlab/Simulink Real-Time toolbox. The experimental results shows that the maximum travel range is 50 mm and positioning accuracy no bigger than 3 nm. The compared experiment with a conventional proportional-integral-derivative controller shows ten times better position accuracy is acquired by using proposed controller.

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Literatur
1.
Zurück zum Zitat Chu, C.-L., Fan, S.-H.: A novel long-travel piezoelectric-driven linear positioning stage. Precision Eng. 30, 85–95 (2006)CrossRef Chu, C.-L., Fan, S.-H.: A novel long-travel piezoelectric-driven linear positioning stage. Precision Eng. 30, 85–95 (2006)CrossRef
2.
Zurück zum Zitat Li, C.-X., Guo-Ying, G., Yang, M.-J., Zhu, L.-M.: Design, analysis and testing of a parallel-kinematic high-bandwidth XY nanopositioning stage. Rev. Sci. Instrum. 84, 12522 (2013) Li, C.-X., Guo-Ying, G., Yang, M.-J., Zhu, L.-M.: Design, analysis and testing of a parallel-kinematic high-bandwidth XY nanopositioning stage. Rev. Sci. Instrum. 84, 12522 (2013)
3.
Zurück zum Zitat Li, C.-X., Gu, G.-Y., Yang, M.-J., Zhu, L.-M.: High-Speed tracking of a nanopositioning stage using modified repetitive control. IEEE Trans. Autom. Sci. Eng. Li, C.-X., Gu, G.-Y., Yang, M.-J., Zhu, L.-M.: High-Speed tracking of a nanopositioning stage using modified repetitive control. IEEE Trans. Autom. Sci. Eng.
4.
Zurück zum Zitat Liu, C.-H., Jywe, W.-Y., Jeng, Y.-R., Hsu, T.-H., Li, Y.-T.: Design and control of a long-traveling nanopositioning stage. Precision Eng. 34, 497–506 (2010)CrossRef Liu, C.-H., Jywe, W.-Y., Jeng, Y.-R., Hsu, T.-H., Li, Y.-T.: Design and control of a long-traveling nanopositioning stage. Precision Eng. 34, 497–506 (2010)CrossRef
5.
Zurück zum Zitat Jie, D., Sun, L., Liu, Y., Zhu, Y., Cai, H.: Design and simulation of a macro-micro dual-drive high acceleration precision XY-stage for IC bonding technology. In: 2005 6th International Conference on Electronic Packaging Technology Jie, D., Sun, L., Liu, Y., Zhu, Y., Cai, H.: Design and simulation of a macro-micro dual-drive high acceleration precision XY-stage for IC bonding technology. In: 2005 6th International Conference on Electronic Packaging Technology
6.
Zurück zum Zitat Elfizy, A.T., Bone, G.M., Elbestawi, M.A.: Design and control of a dual-stage feed drive. Int. J. Mach. Tools Manuf. 45, 153–165 (2005)CrossRef Elfizy, A.T., Bone, G.M., Elbestawi, M.A.: Design and control of a dual-stage feed drive. Int. J. Mach. Tools Manuf. 45, 153–165 (2005)CrossRef
7.
Zurück zum Zitat Lin, C.-J., Yau, H.-T., Tian, Y.-C.: Identification and compensation of nonlinear friction characteristics and precision control for a linear motor stage. IEEE/ASME Trans. Mechatron. 18(4), 1385–1396 (2013)CrossRef Lin, C.-J., Yau, H.-T., Tian, Y.-C.: Identification and compensation of nonlinear friction characteristics and precision control for a linear motor stage. IEEE/ASME Trans. Mechatron. 18(4), 1385–1396 (2013)CrossRef
8.
Zurück zum Zitat Liu, Z.Z., Luo, F.L., Rahman, M.A.: Robust and precision motion control system of linear-motor direct drive for high speed X-Y table positioning mechanism. IEEE Trans. Ind. Electron. 52(5), 1357–1363 (2005)CrossRef Liu, Z.Z., Luo, F.L., Rahman, M.A.: Robust and precision motion control system of linear-motor direct drive for high speed X-Y table positioning mechanism. IEEE Trans. Ind. Electron. 52(5), 1357–1363 (2005)CrossRef
9.
Zurück zum Zitat Liu, T.-H., Lee, Y.-C., Chang, Y.-H.: Adaptive controller design for a linear motor control system. IEEE Trans. Aerosp. Electron. Syst. 40(2), 601–616 (2004)CrossRef Liu, T.-H., Lee, Y.-C., Chang, Y.-H.: Adaptive controller design for a linear motor control system. IEEE Trans. Aerosp. Electron. Syst. 40(2), 601–616 (2004)CrossRef
10.
Zurück zum Zitat Cho, K., Kim, J., Choi, S.B., Oh, S.: A high-precision motion control based on a periodic adaptive disturbance observer in a PMLSM. IEEE/ASME Trans. Mechatron. 20(5), 1083–1095 (2015)CrossRef Cho, K., Kim, J., Choi, S.B., Oh, S.: A high-precision motion control based on a periodic adaptive disturbance observer in a PMLSM. IEEE/ASME Trans. Mechatron. 20(5), 1083–1095 (2015)CrossRef
11.
Zurück zum Zitat Yao, B., Li, X.: Adaptive robust motion control of linear motors for precision manufacturing. Mechatronics 12, 595–616 (2002)CrossRef Yao, B., Li, X.: Adaptive robust motion control of linear motors for precision manufacturing. Mechatronics 12, 595–616 (2002)CrossRef
12.
Zurück zum Zitat Tan, K.K., Huang, S.N., Lee, T.H.: Robust adaptive numerical compensation for friction and force ripple in permanent-magnet linear motors. IEEE Trans. Magn. 38(1), 221–228 (2002)CrossRef Tan, K.K., Huang, S.N., Lee, T.H.: Robust adaptive numerical compensation for friction and force ripple in permanent-magnet linear motors. IEEE Trans. Magn. 38(1), 221–228 (2002)CrossRef
13.
Zurück zum Zitat Yao, B., Al-Majed, M., Tomizuka, M.: High-performance robust motion control of machine tools: an adaptive robust control approach and comparative experiments. IEEE/ASME Trans. Mechatron. 2(2), 63–76 (1997)CrossRef Yao, B., Al-Majed, M., Tomizuka, M.: High-performance robust motion control of machine tools: an adaptive robust control approach and comparative experiments. IEEE/ASME Trans. Mechatron. 2(2), 63–76 (1997)CrossRef
14.
Zurück zum Zitat Tan, K.K., Huang, S.N., Dou, H.F., Lee, T.H., Chin, S.J., Lim, S.Y.: Adaptive robust motion control for precise trajectory tracking applications. ISA Trans. 40, 57–71 (2001)CrossRef Tan, K.K., Huang, S.N., Dou, H.F., Lee, T.H., Chin, S.J., Lim, S.Y.: Adaptive robust motion control for precise trajectory tracking applications. ISA Trans. 40, 57–71 (2001)CrossRef
15.
Zurück zum Zitat Lee, H.S., Tomizuka, M.: Robust motion controller design for high-accuracy positioning systems. IEEE Trans. Ind. Electron. 43(1), 48–55 (1996)CrossRef Lee, H.S., Tomizuka, M.: Robust motion controller design for high-accuracy positioning systems. IEEE Trans. Ind. Electron. 43(1), 48–55 (1996)CrossRef
16.
Zurück zum Zitat Chang, S.B., Wu, S.H., Hu, Y.C.: Submicrometer overshoot control of rapid and precise positioning. Precision Eng. 20(3), 161–170 (1997)CrossRef Chang, S.B., Wu, S.H., Hu, Y.C.: Submicrometer overshoot control of rapid and precise positioning. Precision Eng. 20(3), 161–170 (1997)CrossRef
17.
Zurück zum Zitat Tan, K.K., Lee, T.H., Dou, H.F., Chin, S.J., Zhao, S.: Precision motion control with disturbance observe for pulsewidth-modulated-driven permanent-magnet linear motors. IEEE Trans. Magnet. 39(3) (2003) Tan, K.K., Lee, T.H., Dou, H.F., Chin, S.J., Zhao, S.: Precision motion control with disturbance observe for pulsewidth-modulated-driven permanent-magnet linear motors. IEEE Trans. Magnet. 39(3) (2003)
Metadaten
Titel
Control of a Magnet-Driven Nano Positioning Stage with Long Stroke Based on Disturbance Observer
verfasst von
Letong Ma
Xixian Mo
Bo Zhang
Han Ding
Copyright-Jahr
2017
DOI
https://doi.org/10.1007/978-3-319-65298-6_68