17. Creep in Silicon Nitride (Si₃N₄)

Si₃N₄ has a wide range of applications, such as in: automotive parts; mechanical bearings; high-temperature/thermal-shock-resistant ceramics; orthopedic solutions; metalworking tools; electronic insulators; and diffusion barriers in integrated circuits, to name just a few. The mechanical properties of Si₃N₄ play important roles in modern technology and industry. The evaluation of creep in Si₃N₄, is one of the subjects of this chapter performed by tensile and compressive creep tests in polycrystalline Si₃N₄. SiC-based composites were investigated by flexural and tensile loading of the specimens. A considerable discussion is devoted to cavitation in silicon nitride. Sections of superplasticity, nanosize silicon nitride and stress rupture are integral parts of this chapter. The final section deals with creep recovery in Si₃N₄.