1986 | OriginalPaper | Buchkapitel
Cryogenic Applications of Capacitance-Type Pressure Sensors
verfasst von : Richard Jacobs
Erschienen in: Advances in Cryogenic Engineering
Verlag: Springer US
Enthalten in: Professional Book Archive
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Precise pressure measurement is an important requirement frequently encountered in cryogenic experimentation. Applications range from vapor pressure and gas thermometry to gas sample density measurements. Since a capacitance-type pressure sensing element can be constructed of non-magnetic, UHV-compatible materials to cover a wide range of pressure, be bakeable to 400°C, and be reliable and easy-to-operate, it is an ideal candidate for this task. Design and operational characteristics of this family of instruments with reference to low temperature applications will be reviewed.