Delaminate Behavior of PVD/CPVD Thin Film

Accompanied with sophistication of the technology of creating surface, multi-layered structures of film tend to increase for improving the accuracy with a large degree of the freedom playing an important role. In particular, various kinds of methods for producing film have been proposed and the application range of film has become wider. In this research, focusing on coating film materials fabricated using PVD, CVD and a combined method of PVD+CVD, grasping their surface morphology is aimed. On the other hand, the reliability of such a new material with a different property between the surface function and the interface function is required. Accordingly, different techniques from conventional methods of evaluating functions of laminated material are needed. Therefore, in this research, so-called textured materials with new structure coated by a series of carbon film or titanium nitride film as described in the following, were selected. The effect of applied impact loading on the adhesion and the interface quality of their films was investigated by observation using laser confocal microscope and fractal dimensional analysis of cracks or exfoliation surfaces.