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Microsystem Technologies
Erschienen in: Microsystem Technologies 7/2017

26.07.2016 | Technical Paper

Design and experimental validation of a linear piezoelectric micromotor for dual-slider positioning

verfasst von: Yuxin Peng, Huiying Wang, Shu Wang, Jian Wang, Jie Cao, Haoyong Yu

Erschienen in: Microsystem Technologies | Ausgabe 7/2017

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Abstract

In this paper, a linear piezoelectric micromotor for dual-slider positioning by a single piezoelectric element (PZT) is proposed. A slider 1 and a permanent magnet are connected by the PZT, and a slider 2 is placed on the permanent magnet by the magnetic force. The slider 1 is a small steel cuboid and can be clamped and released by an electromagnet base. When it is released, it can be driven by impact friction force generated by the PZT. When it is clamped, it keeps stationary, and the slider 2 can be positioned based on the smooth impact friction drive of the micromotor. Both the sliders can be positioned independently with a long motion range as well as a high positioning resolution. Due to a single PZT used in the micromotor and miniaturized design of the mechanism, the proposed micromotor has been constructed with a compact size as well as a relatively high loading capacity.
Vorheriger Artikel Ultraviolet irradiation of lubricant and additives thin films to reduce wear to the magnetic head
Nächster Artikel Optimization of structures of DC RF MEMS series switches for low actuation

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Metadaten
Titel
Design and experimental validation of a linear piezoelectric micromotor for dual-slider positioning
verfasst von
Yuxin Peng
Huiying Wang
Shu Wang
Jian Wang
Jie Cao
Haoyong Yu
Publikationsdatum
26.07.2016
Verlag
Springer Berlin Heidelberg
Erschienen in
Microsystem Technologies / Ausgabe 7/2017
Print ISSN: 0946-7076
Elektronische ISSN: 1432-1858
DOI
https://doi.org/10.1007/s00542-016-3088-8

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