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Erschienen in:
2021 | OriginalPaper | Buchkapitel
4. Design and FEM Simulation of Guided Beam Piezoelectric Energy Harvester
verfasst von : Shanky Saxena, Ritu Sharma, B. D. Pant
Erschienen in: Design and Development of MEMS based Guided Beam Type Piezoelectric Energy Harvester
Verlag: Springer Singapore
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Abstract
In this chapter, design, FEM analysis and comparison of guided two-beam and four-beam P-VEH have been discussed. Device parameters such as resonance frequency, beam displacement, stress and electric potential have been obtained and compared for both devices. A heavy pyramidal-shape seismic mass is connected at the center for higher electric potential and lower resonance frequency. A guided four-beam device can withstand higher stress and gives reliable operation as compared to a guided two-beam device. Design optimization for the split electrodes has been done for higher output potential and low-frequency operation. The optimized design for guided two-beam and four-beam device has been selected for fabrication in MEMS technology.