Skip to main content
Erschienen in: Microsystem Technologies 2/2020

22.06.2019 | Technical Paper

Design and performance analysis of double cantilever type capacitive shunt RF MEMS switch

verfasst von: K. Girija Sravani, K. Srinivasa Rao, D. Prathyusha, B. V. Sai Kiran, B. Siva Kumar, R. Prem Kumar, K. Santhi Tarun

Erschienen in: Microsystem Technologies | Ausgabe 2/2020

Einloggen

Aktivieren Sie unsere intelligente Suche um passende Fachinhalte oder Patente zu finden.

search-config
loading …

Abstract

This paper presents a novel structure of capacitance shunt type RF switch for 5G applications. The proposed RF MEMS switch is having Cantilever type designed with optimized dimensions to operate in V-band applications. The electromechanical analysis is done by using the COMSOL tool. The actuation voltage of the proposed switch is 10.5 V with the air gap of 1 µm and gold as a beam material. The proposed switch with the meanders and perforations show the scattering parameters in HFSS software such as insertion loss (S12) of − 0.033 dB and return loss (S11) less than − 48 dB and the isolation (S21) calculated in off-state as − 62 dB at 50 GHz.

Sie haben noch keine Lizenz? Dann Informieren Sie sich jetzt über unsere Produkte:

Springer Professional "Wirtschaft+Technik"

Online-Abonnement

Mit Springer Professional "Wirtschaft+Technik" erhalten Sie Zugriff auf:

  • über 102.000 Bücher
  • über 537 Zeitschriften

aus folgenden Fachgebieten:

  • Automobil + Motoren
  • Bauwesen + Immobilien
  • Business IT + Informatik
  • Elektrotechnik + Elektronik
  • Energie + Nachhaltigkeit
  • Finance + Banking
  • Management + Führung
  • Marketing + Vertrieb
  • Maschinenbau + Werkstoffe
  • Versicherung + Risiko

Jetzt Wissensvorsprung sichern!

Springer Professional "Technik"

Online-Abonnement

Mit Springer Professional "Technik" erhalten Sie Zugriff auf:

  • über 67.000 Bücher
  • über 390 Zeitschriften

aus folgenden Fachgebieten:

  • Automobil + Motoren
  • Bauwesen + Immobilien
  • Business IT + Informatik
  • Elektrotechnik + Elektronik
  • Energie + Nachhaltigkeit
  • Maschinenbau + Werkstoffe




 

Jetzt Wissensvorsprung sichern!

Literatur
Zurück zum Zitat Akpakwu GA, Silva BJ, Hancke GP, Abu-Mahfouz AM (2018) A survey on 5G networks for the internet of things: communication technologies and challenges. IEEE Access 6:3619–3647CrossRef Akpakwu GA, Silva BJ, Hancke GP, Abu-Mahfouz AM (2018) A survey on 5G networks for the internet of things: communication technologies and challenges. IEEE Access 6:3619–3647CrossRef
Zurück zum Zitat Brown ER (1998) RF-MEMS switches for reconfigurable integrated circuits. IEEE Trans Microw Theory Tech 46(11):1868–1880CrossRef Brown ER (1998) RF-MEMS switches for reconfigurable integrated circuits. IEEE Trans Microw Theory Tech 46(11):1868–1880CrossRef
Zurück zum Zitat Chakraborty A, Gupta B, Sarkar K (2014) Design, fabrication and characterization of miniature RF MEMS switched capacitor based phase shifter. Microelectron J 45(8):1093–1102CrossRef Chakraborty A, Gupta B, Sarkar K (2014) Design, fabrication and characterization of miniature RF MEMS switched capacitor based phase shifter. Microelectron J 45(8):1093–1102CrossRef
Zurück zum Zitat Goldsmith CL et al (1998) Performance of low-loss RF MEMS capacitive switches. IEEE Microwave Guided Wave Lett 8(8):269–271CrossRef Goldsmith CL et al (1998) Performance of low-loss RF MEMS capacitive switches. IEEE Microwave Guided Wave Lett 8(8):269–271CrossRef
Zurück zum Zitat Iannacci J (2017a) RF-MEMS for high-performance and widely reconfigurable passive components—a review with focus on future telecommunications, internet of things (IoT) and 5G applications. J King Saud Univ Sc 29(4):436–443CrossRef Iannacci J (2017a) RF-MEMS for high-performance and widely reconfigurable passive components—a review with focus on future telecommunications, internet of things (IoT) and 5G applications. J King Saud Univ Sc 29(4):436–443CrossRef
Zurück zum Zitat Ijaz A, Zhang L, Grau M, Mohamed A, Vural S, Quddus AU, Imran MA, Foh CH, Tafazolli R (2016) Enabling massive IoT in 5G and beyond systems: PHY radio frame design considerations. IEEE Access 4:3322–3339CrossRef Ijaz A, Zhang L, Grau M, Mohamed A, Vural S, Quddus AU, Imran MA, Foh CH, Tafazolli R (2016) Enabling massive IoT in 5G and beyond systems: PHY radio frame design considerations. IEEE Access 4:3322–3339CrossRef
Zurück zum Zitat Khan AS, Shanmuganantham T (2017) Simulation and analysis of RF MEMS cantilever switch for low actuation voltage. In: IEEE international conference on circuits and systems. Thiruvananthapuram, India Khan AS, Shanmuganantham T (2017) Simulation and analysis of RF MEMS cantilever switch for low actuation voltage. In: IEEE international conference on circuits and systems. Thiruvananthapuram, India
Zurück zum Zitat Kim HC, Chun K (2007) RF MEMS technology. IEEJ Trans Electr Electron Eng 2(3):249–261CrossRef Kim HC, Chun K (2007) RF MEMS technology. IEEJ Trans Electr Electron Eng 2(3):249–261CrossRef
Zurück zum Zitat Lakshmi Narayana T, Girija Sravani K, Srinivasa Rao K (2017) Design and analysis of CPW based shunt capacitive RF MEMS switch”. Cogent Eng 4:1363356 Lakshmi Narayana T, Girija Sravani K, Srinivasa Rao K (2017) Design and analysis of CPW based shunt capacitive RF MEMS switch”. Cogent Eng 4:1363356
Zurück zum Zitat Lee YS, Jang YH, Kim JM, Kim YK (2010) A 50–110 GHz ohmic contact RF MEMS silicon switch with high isolation. In: IEEE 23rd international conference on micro electro mechanical systems, 24–28 January 2010, Wanchai, Hong Kong, China, pp 759–762 Lee YS, Jang YH, Kim JM, Kim YK (2010) A 50–110 GHz ohmic contact RF MEMS silicon switch with high isolation. In: IEEE 23rd international conference on micro electro mechanical systems, 24–28 January 2010, Wanchai, Hong Kong, China, pp 759–762
Zurück zum Zitat Mafinejad Y, Kouzani AZ, Mafinezhad K, Izadi D (2009) Design and simulation of a RF MEMS shunt switch for Ka and V bands and the impact of varying its geometrical parameters. In: 52nd IEEE international midwest symposium on circuits and systems, pp 823–826. https://doi.org/10.1109/MWSCAS.2009.5235895 Mafinejad Y, Kouzani AZ, Mafinezhad K, Izadi D (2009) Design and simulation of a RF MEMS shunt switch for Ka and V bands and the impact of varying its geometrical parameters. In: 52nd IEEE international midwest symposium on circuits and systems, pp 823–826. https://​doi.​org/​10.​1109/​MWSCAS.​2009.​5235895
Zurück zum Zitat Rao KS, Thalluri LN, Guha K, Sravani KG (2018a) Fabrication and characterization of capacitive RF MEMS perforated switch. IEEE Access 6:77519–77528CrossRef Rao KS, Thalluri LN, Guha K, Sravani KG (2018a) Fabrication and characterization of capacitive RF MEMS perforated switch. IEEE Access 6:77519–77528CrossRef
Zurück zum Zitat Sharma V, Tiwari R (2016) A review paper on “IOT” & it’s smart applications. Int J Sci Eng Technol Res (IJSETR) 5(2):472–476 Sharma V, Tiwari R (2016) A review paper on “IOT” & it’s smart applications. Int J Sci Eng Technol Res (IJSETR) 5(2):472–476
Zurück zum Zitat Vu TM, Prigent G, Ruan J, Rumeau A, Pons P, Plana R (2009) Fabrication and characterization of RF-MEMS switch in V-band. In: Asia Pacific microwave conference. IEEE, pp 202–205 Vu TM, Prigent G, Ruan J, Rumeau A, Pons P, Plana R (2009) Fabrication and characterization of RF-MEMS switch in V-band. In: Asia Pacific microwave conference. IEEE, pp 202–205
Zurück zum Zitat Vu TM, Prigent G, Ruan J, Plan R (2012) Design and fabrication of RF-MEMS switch for V-band reconfigurable applications. Prog Electromagn Res 39:301–318CrossRef Vu TM, Prigent G, Ruan J, Plan R (2012) Design and fabrication of RF-MEMS switch for V-band reconfigurable applications. Prog Electromagn Res 39:301–318CrossRef
Zurück zum Zitat Ziko MH, Koel A (2018) Optimum electromagnetic modelling of RF MEMS switches. Elektronika ir Elektrotechnika 24(5):46–50CrossRef Ziko MH, Koel A (2018) Optimum electromagnetic modelling of RF MEMS switches. Elektronika ir Elektrotechnika 24(5):46–50CrossRef
Metadaten
Titel
Design and performance analysis of double cantilever type capacitive shunt RF MEMS switch
verfasst von
K. Girija Sravani
K. Srinivasa Rao
D. Prathyusha
B. V. Sai Kiran
B. Siva Kumar
R. Prem Kumar
K. Santhi Tarun
Publikationsdatum
22.06.2019
Verlag
Springer Berlin Heidelberg
Erschienen in
Microsystem Technologies / Ausgabe 2/2020
Print ISSN: 0946-7076
Elektronische ISSN: 1432-1858
DOI
https://doi.org/10.1007/s00542-019-04505-0

Weitere Artikel der Ausgabe 2/2020

Microsystem Technologies 2/2020 Zur Ausgabe

Neuer Inhalt