Design, modeling, and analysis of a new XYθ piezoelectric microstage featuring high amplification ratios and multiple actuation modes

This paper presents the design, modeling, and analysis of a new XYθ piezoelectric microstage with high amplification ratios and fully symmetrical structures. Through the reconfigurable assembly positions of piezoelectric actuators, the proposed microstage can provide multiple actuation modes and low translational parasitic motion. The microstage is devised using improved four-bar amplification mechanisms and parallelogram guiding mechanisms. Based on the matrix-based compliance modeling, static and dynamic models are obtained. The theoretical models are analyzed by finite element analysis (FEA). Finally, a prototype of the proposed microstage is manufactured, an experimental system is set up, and the performance of the microstage is tested. The experimental results show that the microstage has amplification ratios of 8.40 (x-axis) and 8.52 (y-axis). The displacement coupling ratios in the x- and y-axis directions are 0.83% and 0.94%, respectively. Moreover, the maximum rotation angle is ± 2379.18 μrad when the microstage uses the actuation mode of the pure center rotation. The XYθ microstage is capable of multiscale micromanipulation.