2006 | OriginalPaper | Buchkapitel
Design of Electro-Thermal Micro-Actuators: Mechanics and Electronic Position Detection
verfasst von : Kalin V. Lazarov, Eniko T. Enikov
Erschienen in: Microsystems Mechanical Design
Verlag: Springer Vienna
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This chapter is devoted to the design of electro-thermal micro-actuators with capacitive position feedback. Analytical and finite element solutions of the electro-thermal and thermo-elastic problems are presented. A separate section is devoted to the challenging problem of displacement determination using charge sensitive amplifiers for high-precision capacitance measurements. These are illustrated with examples of electronic measurement circuits tested by the authors.