Anzeige
Erschienen in:
2019 | OriginalPaper | Buchkapitel
Development of a 3-Axis Displacement Measuring Heterodyne Interferometer System Usable with a He-Ne Laser of Either 3.76 MHz or 20 MHz Split Frequency
verfasst von : Kyu Sik Yoon, Eun Ji Jeong, Don Young Jeong, Chu-Shik Kang
Erschienen in: Proceedings of the 12th International Conference on Measurement and Quality Control - Cyber Physical Issue
Aktivieren Sie unsere intelligente Suche, um passende Fachinhalte oder Patente zu finden.
Wählen Sie Textabschnitte aus um mit Künstlicher Intelligenz passenden Patente zu finden. powered by
Markieren Sie Textabschnitte, um KI-gestützt weitere passende Inhalte zu finden. powered by
Abstract
We present a 3-axis displacement measuring heterodyne interferometer system developed for use with a He-Ne laser at the wavelength of 633 nm having a split frequency of either 3.76 MHz or 20 MHz. The system consists of an optical interferometer, a signal processing board, and a software.
The interferometer can simultaneously measure the displacements of three axes, from which the distance, tilt angles of a moving object can be determined in real time. A digital logic circuit which calculates the displacement values from electric signals converted from 3 optical interference signals, was developed. To demonstrate the measured results graphically, we developed a graphical-user-interface software. In addition, a feedback function through a high speed communication bus was added to the system so that it can be applied for motion control of a moving stage requiring scanning and alignment of a thin film coated substrate such as a silicon wafer. The performance of the interferometer was checked by comparing the measurement values of the displacement of a moving stage obtained simultaneously by a commercial laser interferometer and the developed interferometer.