Development of a novel long range piezoelectric motor based on double rectangular trajectories driving

This paper proposes a novel stepping type piezoelectric motor that can perform long range rotational motion with high resolution. Pseudo-rigid-body method is used to establish the kinematics model of the driving mechanism and analyze the motion trajectory of the driving foot. The static deformation of the driving mechanism is simulated by finite element analysis. In experiments, a motor prototype is fabricated and its performance is tested by the established experimental system. The results indicate that the motor prototype can work stably step by step and all steps have high reproducibility. The prototype can achieve 331.2 μrad maximum stepping angle at the driving voltage of 150 V and driving frequency of 1 Hz. The minimum stable stepping angle and the maximum output torque are 1.47 µrad and 76.44 mNm, respectively. The maximum angular velocity of the motor prototype is about 37,662.1 μrad/s when the driving voltage is 150 V and the driving frequency is 128 Hz. By applying proper driving voltage and frequency, the proposed piezoelectric motor can produce a satisfactory angular velocity.