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Microsystem Technologies
Erschienen in: Microsystem Technologies 4/2018

25.10.2017 | Technical Paper

Dynamics and vibration analysis of suspended microchannel resonators based on strain gradient theory

verfasst von: Mohsen Vakilzadeh, Ramin Vatankhah, Mohammad Eghtesad

Erschienen in: Microsystem Technologies | Ausgabe 4/2018

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Abstract

In this paper, dynamics of a suspended microchannel resonator (SMR) will be derived using the strain gradient theory. Accordingly, the size dependent governing equation and corresponding boundary conditions will be obtained using the extended Hamilton’s principle for open systems. The proposed strain gradient theory has three length scale parameters which can be reduced to the modified couple stress theory and the classical theory when two of three length scale parameters or all of them are set to zero, respectively. Also, the size effect of micro-flow associated with the flow velocity profile will be considered in the governing equation of motion. The stability analysis is then carried out to obtain complex frequencies and critical flutter speeds. Finally, the effects of flowing particle in the microchannel and the associated frequency shifts induced by the added mass will be studied.
Vorheriger Artikel Magnetic films for electromagnetic actuation in MEMS switches
Nächster Artikel A bead-based microfluidic system for joint detection in TORCH screening at point-of-care testing

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Metadaten
Titel
Dynamics and vibration analysis of suspended microchannel resonators based on strain gradient theory
verfasst von
Mohsen Vakilzadeh
Ramin Vatankhah
Mohammad Eghtesad
Publikationsdatum
25.10.2017
Verlag
Springer Berlin Heidelberg
Erschienen in
Microsystem Technologies / Ausgabe 4/2018
Print ISSN: 0946-7076
Elektronische ISSN: 1432-1858
DOI
https://doi.org/10.1007/s00542-017-3596-1

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