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Microsystem Technologies
Erschienen in: Microsystem Technologies 3/2018

30.09.2017 | Technical Paper

Dynamics and vibrations of particle-sensing MEMS considering thermal and electrostatic actuation

verfasst von: Shahin Siahpour, Mahdi Moghimi Zand, Mohammad Mousavi

Erschienen in: Microsystem Technologies | Ausgabe 3/2018

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Abstract

The dynamic behavior of micro-cantilevers and micro-bridges under electrostatic and thermal base actuations is investigated in this paper. To solve the equation of motion for the systems, a finite element model is presented and numerical solutions are proposed. For micro-bridge, nonlinear terms are applied in the equation of motion and influence of these terms are studied. Effect of base stiffness is also investigated. Both electrostatic and thermal base excitations are applied to the system in order to investigate the dynamic response of the system.
Vorheriger Artikel Free vibration and critical angular velocity of a rotating variable thickness two-directional FG circular microplate
Nächster Artikel An ultra-low power high-performance CMOS temperature sensor with an inaccuracy of − 0.3 °C/ + 0.1 °C for aerospace applications

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Metadaten
Titel
Dynamics and vibrations of particle-sensing MEMS considering thermal and electrostatic actuation
verfasst von
Shahin Siahpour
Mahdi Moghimi Zand
Mohammad Mousavi
Publikationsdatum
30.09.2017
Verlag
Springer Berlin Heidelberg
Erschienen in
Microsystem Technologies / Ausgabe 3/2018
Print ISSN: 0946-7076
Elektronische ISSN: 1432-1858
DOI
https://doi.org/10.1007/s00542-017-3554-y

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