Effect of e-beam evaporated elemental metal stack precursors on the property of Cu(InGa)Se₂ thin films through two-step process

Two-step process is considered to be more simple than co-evaporation method in Cu(InGa)Se₂ (CIGS) thin films preparation process. However, research on CIGS thin films prepared by two-step process based on evaporation of elemental metals Cu, In and Ga is hardly reported. In this work, four types of metal stacks engineered as In/Ga/Cu/Ga/In (type A), Cu/Ga/In (type B), Cu/In/Ga (type C) and Cu/Ga/In/Cu (type D) were prepared and effects of metal stack precursors on properties of CIGS thin films formed by two-step process were studied. All types of precursors consisted of Cu–In, Cu–Ga and In phases. CIGS thin film from type A precursor showed poor compactness and relative high surface roughness due to the ordered defect compounds on the surface. Type B precursor exhibited a better compactness and crystal quality which led to an optimal structural property of films among all types of CIGS thin films. The reduction of Ga/(Ga + In) and the gaps appeared at the Mo/CIGS interface of CIGS thin film from type C precursor were explained by the re-evaporation of Ga element and compensation of In element during selenization. Grain size in CIGS thin film from type D is a little smaller than that from type B. Models of selenization process in different types of precursors were given. CIGS solar cell from type B exhibited the highest conversion efficiency of 9.2%.