Skip to main content
Erschienen in: Journal of Nanoparticle Research 8/2014

01.08.2014 | Research Paper

Electrical properties of nano-sized indium tin oxide (ITO) doped with CuO, Cr2O3 and ZrO2

verfasst von: H. A. Abbas, A. M. Youssef, F. F. Hammad, A. M. A. Hassan, Z. M. Hanafi

Erschienen in: Journal of Nanoparticle Research | Ausgabe 8/2014

Einloggen

Aktivieren Sie unsere intelligente Suche, um passende Fachinhalte oder Patente zu finden.

search-config
loading …

Abstract

Undoped and doped indium tin oxide (ITO) with different concentrations (2, 4, and 6 mol%) of different dopants (CuO, Cr2O3, and ZrO2) were prepared in the nano-size scale (19–33 nm) using Pechini method. The thermal decomposition of the precursors was studied. The electrical properties of all the prepared samples were investigated. All the investigated systems have higher conductivity than that of ITO. For ITO doped with CuO, as the concentration of CuO increases, the conductivity increases. The highest conductivity was obtained for ITO doped with 6 mol% of CuO. For ITO doped with Cr2O3, as the concentration of Cr2O3 increases the conductivity increases and above 4 mol% Cr2O3 the conductivity decreases. For ITO doped with ZrO2, as the ZrO2 concentration increases, the conductivity increases up to 4 mol% of ZrO2 and then decreases. The band gap was detected for all the investigated systems.

Sie haben noch keine Lizenz? Dann Informieren Sie sich jetzt über unsere Produkte:

Springer Professional "Wirtschaft+Technik"

Online-Abonnement

Mit Springer Professional "Wirtschaft+Technik" erhalten Sie Zugriff auf:

  • über 102.000 Bücher
  • über 537 Zeitschriften

aus folgenden Fachgebieten:

  • Automobil + Motoren
  • Bauwesen + Immobilien
  • Business IT + Informatik
  • Elektrotechnik + Elektronik
  • Energie + Nachhaltigkeit
  • Finance + Banking
  • Management + Führung
  • Marketing + Vertrieb
  • Maschinenbau + Werkstoffe
  • Versicherung + Risiko

Jetzt Wissensvorsprung sichern!

Springer Professional "Technik"

Online-Abonnement

Mit Springer Professional "Technik" erhalten Sie Zugriff auf:

  • über 67.000 Bücher
  • über 390 Zeitschriften

aus folgenden Fachgebieten:

  • Automobil + Motoren
  • Bauwesen + Immobilien
  • Business IT + Informatik
  • Elektrotechnik + Elektronik
  • Energie + Nachhaltigkeit
  • Maschinenbau + Werkstoffe




 

Jetzt Wissensvorsprung sichern!

Anhänge
Nur mit Berechtigung zugänglich
Literatur
Zurück zum Zitat Al-Dahoudi N, Aegerter MA (2003) Wet coating deposition of ITO coatings on plastic substrates. J Sol Gel Sci Technol 26:693–697CrossRef Al-Dahoudi N, Aegerter MA (2003) Wet coating deposition of ITO coatings on plastic substrates. J Sol Gel Sci Technol 26:693–697CrossRef
Zurück zum Zitat Antony A, Nisha M, Manoj R, Jayaraj MK (2004) Influence of target to substrate spacing on the properties of ITO thin films. Appl Surf Sci 225:294–301 Antony A, Nisha M, Manoj R, Jayaraj MK (2004) Influence of target to substrate spacing on the properties of ITO thin films. Appl Surf Sci 225:294–301
Zurück zum Zitat Baqiah H, Ibrahim NB, Abdi MH, Halim SA (2013) Electrical transport, microstructure and optical properties of Cr-doped In2O3 thin film prepared by sol–gel method. J Alloys Compd 575:198–206CrossRef Baqiah H, Ibrahim NB, Abdi MH, Halim SA (2013) Electrical transport, microstructure and optical properties of Cr-doped In2O3 thin film prepared by sol–gel method. J Alloys Compd 575:198–206CrossRef
Zurück zum Zitat Campet G, Han SD, Wen SJ, Manaud JP, Portier J (1993) The electronic effect of Ti4+, Zr4+ and Ge4+ doping upon the physical properties of In2O3 and Sn-doped In2O3 ceramics: application to new highly-transparent conductive electrodes. Mater Sci Eng B19:285–289CrossRef Campet G, Han SD, Wen SJ, Manaud JP, Portier J (1993) The electronic effect of Ti4+, Zr4+ and Ge4+ doping upon the physical properties of In2O3 and Sn-doped In2O3 ceramics: application to new highly-transparent conductive electrodes. Mater Sci Eng B19:285–289CrossRef
Zurück zum Zitat Caricato AP, Cesaria M, Luches A, Martino M, Maruccio G et al (2010) Electrical and optical properties of ITO and ITO/Cr-doped ITO films. Appl Phys A 101:753–758CrossRef Caricato AP, Cesaria M, Luches A, Martino M, Maruccio G et al (2010) Electrical and optical properties of ITO and ITO/Cr-doped ITO films. Appl Phys A 101:753–758CrossRef
Zurück zum Zitat Chion CBS, Tsai JH (1999) Antireflective coating for ITO films deposited on glass substrates. J Mater Sci 10:491–495 Chion CBS, Tsai JH (1999) Antireflective coating for ITO films deposited on glass substrates. J Mater Sci 10:491–495
Zurück zum Zitat Chopra KL, Major S, Pandya DK (1983) Transparent conductors. Thin Solid Films 102:1–46CrossRef Chopra KL, Major S, Pandya DK (1983) Transparent conductors. Thin Solid Films 102:1–46CrossRef
Zurück zum Zitat Coats AW, Redfern JP (1964) Kinetic parameters from thermogravimetric data. Nature 201:68–69CrossRef Coats AW, Redfern JP (1964) Kinetic parameters from thermogravimetric data. Nature 201:68–69CrossRef
Zurück zum Zitat Coutal C, Azema A, Roustan J-C (1996) Fabrication and characterization of ITO thin films deposited by excimer laser evaporation. Thin Solid Films 288:248–253CrossRef Coutal C, Azema A, Roustan J-C (1996) Fabrication and characterization of ITO thin films deposited by excimer laser evaporation. Thin Solid Films 288:248–253CrossRef
Zurück zum Zitat Frank G, Kostlin H (1982) Electrical properties and defect model of tin-doped indium oxide layers. Appl Phys A 27:197–206CrossRef Frank G, Kostlin H (1982) Electrical properties and defect model of tin-doped indium oxide layers. Appl Phys A 27:197–206CrossRef
Zurück zum Zitat Gauckler LJ, Sasaki K (1995) Ionic and electronic conductivities of homogeneous and heterogeneous materials in the system ZrO2-In2O3. Solid State Ionics 75:203–210CrossRef Gauckler LJ, Sasaki K (1995) Ionic and electronic conductivities of homogeneous and heterogeneous materials in the system ZrO2-In2O3. Solid State Ionics 75:203–210CrossRef
Zurück zum Zitat Ginley DS, Bright C (2000) Transparent conducting oxides. MRS Bull 25:15–18CrossRef Ginley DS, Bright C (2000) Transparent conducting oxides. MRS Bull 25:15–18CrossRef
Zurück zum Zitat Granqvist C, Hultaker A (2002) Transparent and conductive ITO films new development and applications. Thin Solid Films 411:1–5CrossRef Granqvist C, Hultaker A (2002) Transparent and conductive ITO films new development and applications. Thin Solid Films 411:1–5CrossRef
Zurück zum Zitat Gregory OJ, You T, Crisman EE (2005) Effect of aluminum doping on the high-temperature stability and piezoresistive response of indium tin oxide strain sensors. Thin Solid Films 476:344CrossRef Gregory OJ, You T, Crisman EE (2005) Effect of aluminum doping on the high-temperature stability and piezoresistive response of indium tin oxide strain sensors. Thin Solid Films 476:344CrossRef
Zurück zum Zitat Horowitz HH, Metzger G (1963) A new analysis of thermogravimetric traces. Anal Chem 35:1464CrossRef Horowitz HH, Metzger G (1963) A new analysis of thermogravimetric traces. Anal Chem 35:1464CrossRef
Zurück zum Zitat Hsu CM, Lee JW, Meen TH, Wu WT (2005) Preparation and characterization of Ni–indium tin oxide cosputtered thin films for organic light-emitting diode application. Thin Solid Films 474:19–24CrossRef Hsu CM, Lee JW, Meen TH, Wu WT (2005) Preparation and characterization of Ni–indium tin oxide cosputtered thin films for organic light-emitting diode application. Thin Solid Films 474:19–24CrossRef
Zurück zum Zitat Jana S, Biswas PK (2009) Effect of Zr (IV) doping on the optical properties of sol–gel based nanostructured indium oxide films on glass. Mater Chem Phys 117:511–516 Jana S, Biswas PK (2009) Effect of Zr (IV) doping on the optical properties of sol–gel based nanostructured indium oxide films on glass. Mater Chem Phys 117:511–516
Zurück zum Zitat Kerkachea L, Layadia A, Mosserb A (2009) Effect of oxygen partial pressure on the structural and optical properties of dc sputtered ITO thin films. J Alloys Compd 485:46–50CrossRef Kerkachea L, Layadia A, Mosserb A (2009) Effect of oxygen partial pressure on the structural and optical properties of dc sputtered ITO thin films. J Alloys Compd 485:46–50CrossRef
Zurück zum Zitat Kim S-M, Seo K-H, Lee J-H, Kim J–J, Lee HY, Lee J-S (2006) Preparation and sintering of nanocrystalline ITO powders with different SnO2 content. J Eur Ceram Soc 26:73–80CrossRef Kim S-M, Seo K-H, Lee J-H, Kim J–J, Lee HY, Lee J-S (2006) Preparation and sintering of nanocrystalline ITO powders with different SnO2 content. J Eur Ceram Soc 26:73–80CrossRef
Zurück zum Zitat Kumar SRS, Das VD, Kasiviswanathan S (2009) Thermopower and optical studies on undoped and manganese doped indium tin oxide films. Thin Solid Films 518:1390–1393CrossRef Kumar SRS, Das VD, Kasiviswanathan S (2009) Thermopower and optical studies on undoped and manganese doped indium tin oxide films. Thin Solid Films 518:1390–1393CrossRef
Zurück zum Zitat Kundu S, Das N, Chakraborty S, Bhattacharya D, Biswas PK (2013) Synthesis of sol–gel based nanostructured Cr(III)-doped indium tin oxide films on glass and their optical and magnetic characterizations. Opt Mater 35:1029–1034CrossRef Kundu S, Das N, Chakraborty S, Bhattacharya D, Biswas PK (2013) Synthesis of sol–gel based nanostructured Cr(III)-doped indium tin oxide films on glass and their optical and magnetic characterizations. Opt Mater 35:1029–1034CrossRef
Zurück zum Zitat Lewis BG, Paine DC (2000) Applications and processing of transparent conducting oxides. MRS Bull 25:22–27CrossRef Lewis BG, Paine DC (2000) Applications and processing of transparent conducting oxides. MRS Bull 25:22–27CrossRef
Zurück zum Zitat Lutterotti L, Scardi P, Maistrelli P (1992) LSI—a computer program for simultaneous refinement of material structure and microstructure. J Appl Cryst 25:459–462CrossRef Lutterotti L, Scardi P, Maistrelli P (1992) LSI—a computer program for simultaneous refinement of material structure and microstructure. J Appl Cryst 25:459–462CrossRef
Zurück zum Zitat Masaya Y, Morikazu K (1998) Raw material for producing powder of indium-tin oxide aciculae and method of producing the raw material, powder of indium-tin oxide aciculae and method of producing the powder, electroconductive paste and light-transmitting electroconductive film. US Patent No 5849221 Masaya Y, Morikazu K (1998) Raw material for producing powder of indium-tin oxide aciculae and method of producing the raw material, powder of indium-tin oxide aciculae and method of producing the powder, electroconductive paste and light-transmitting electroconductive film. US Patent No 5849221
Zurück zum Zitat Minami T, Yamamoto T, Toda Y, Miyata T (2000) Transparent conducting zinc- co-doped ITO films prepared by magnetron sputtering. Thin Solid Films 373:189CrossRef Minami T, Yamamoto T, Toda Y, Miyata T (2000) Transparent conducting zinc- co-doped ITO films prepared by magnetron sputtering. Thin Solid Films 373:189CrossRef
Zurück zum Zitat Mohammadia S, Abdizadeh H, Golobostanfard MR (2013) Opto-electronic properties of molybdenum doped indium tin oxide nanostructured thin films prepared via sol–gel spin coating. Ceram Int 39:6953–6961CrossRef Mohammadia S, Abdizadeh H, Golobostanfard MR (2013) Opto-electronic properties of molybdenum doped indium tin oxide nanostructured thin films prepared via sol–gel spin coating. Ceram Int 39:6953–6961CrossRef
Zurück zum Zitat Pechini MP (1967) Method for preparing lead and alkaline earth titanates and niobates and coating method using the same to form a capacitor. US Patent No 3, 330, 697 Pechini MP (1967) Method for preparing lead and alkaline earth titanates and niobates and coating method using the same to form a capacitor. US Patent No 3, 330, 697
Zurück zum Zitat Rietveld HM (1967) Line profiles of neutron powder-diffraction peaks for structure refinement. Act Cryst 22:151–152CrossRef Rietveld HM (1967) Line profiles of neutron powder-diffraction peaks for structure refinement. Act Cryst 22:151–152CrossRef
Zurück zum Zitat Rietveld HM (1969) A profile refinement method for nuclear and magnetic structures. J Appl Cryst 2:65–71CrossRef Rietveld HM (1969) A profile refinement method for nuclear and magnetic structures. J Appl Cryst 2:65–71CrossRef
Zurück zum Zitat Rosario AV, Pereira EC (2006) The effect of composition variables on precursor degradation and their consequence on Nb2O5 film properties prepared by the Pechini method. J Sol Gel Sci Technol 38:233–240CrossRef Rosario AV, Pereira EC (2006) The effect of composition variables on precursor degradation and their consequence on Nb2O5 film properties prepared by the Pechini method. J Sol Gel Sci Technol 38:233–240CrossRef
Zurück zum Zitat Sasaki K (1993) Phase Equilibria, electrical conductivity and electrochemical properties of ZrO2-In2O3. PhD dissertation, Swiss Federal Institute of Technology, Zurich Sasaki K (1993) Phase Equilibria, electrical conductivity and electrochemical properties of ZrO2-In2O3. PhD dissertation, Swiss Federal Institute of Technology, Zurich
Zurück zum Zitat Suzuki M, Maeda Y, Muraoka M, Higuchi S, Sawada Y (1998) ITO films sputter-deposited using an ITO target sintered with vanadium oxide additive. Mater Sci Eng B 54:43–45CrossRef Suzuki M, Maeda Y, Muraoka M, Higuchi S, Sawada Y (1998) ITO films sputter-deposited using an ITO target sintered with vanadium oxide additive. Mater Sci Eng B 54:43–45CrossRef
Zurück zum Zitat Tseng S, Hsiao W, Huang K-C, Chiang D, Chen M-F, Chou C-P (2010) Laser scribing of indium tin oxide (ITO) thin films deposited on various substrates for touch panels. Appl Surf Sci 257:1487–1494 Tseng S, Hsiao W, Huang K-C, Chiang D, Chen M-F, Chou C-P (2010) Laser scribing of indium tin oxide (ITO) thin films deposited on various substrates for touch panels. Appl Surf Sci 257:1487–1494
Zurück zum Zitat Ukah NB, Gupta RK, Kahol PK, Ghosh K (2009) Influence of oxygen growth pressure on laser ablated Cr-doped In2O3 thin films. Appl Surf Sci 255:9420–9424 Ukah NB, Gupta RK, Kahol PK, Ghosh K (2009) Influence of oxygen growth pressure on laser ablated Cr-doped In2O3 thin films. Appl Surf Sci 255:9420–9424
Zurück zum Zitat Ye F, Cai X-M, Dai F-P, Jing S-Y, Zhang D-P, Fan P, Liu L-J (2011) Cu–In–O composite thin films deposited by reactive DC magnetron sputtering. Phys B 406:516–519CrossRef Ye F, Cai X-M, Dai F-P, Jing S-Y, Zhang D-P, Fan P, Liu L-J (2011) Cu–In–O composite thin films deposited by reactive DC magnetron sputtering. Phys B 406:516–519CrossRef
Zurück zum Zitat Young RA, Wiles DB (1982) Profile shape functions in Rietveld refinements. J Appl Cryst 15:430–438CrossRef Young RA, Wiles DB (1982) Profile shape functions in Rietveld refinements. J Appl Cryst 15:430–438CrossRef
Zurück zum Zitat Youssef AM, Abbas HA, Hammad FF, Hassan AMA, Hanafi ZM (2012) X-ray diffraction and IR spectroscopy for nano-sized ITO doped with some metal oxides. Life Sci J 9:946–952 Youssef AM, Abbas HA, Hammad FF, Hassan AMA, Hanafi ZM (2012) X-ray diffraction and IR spectroscopy for nano-sized ITO doped with some metal oxides. Life Sci J 9:946–952
Zurück zum Zitat Zhang B, Dong X, Xu X, Zhao P, Wu J (2008) Characteristics of zirconium-doped indium tin oxide thin films deposited by magnetron sputtering. Sol Energy Mat Sol Cells 92:1224–1229CrossRef Zhang B, Dong X, Xu X, Zhao P, Wu J (2008) Characteristics of zirconium-doped indium tin oxide thin films deposited by magnetron sputtering. Sol Energy Mat Sol Cells 92:1224–1229CrossRef
Zurück zum Zitat Zuo Y, Ge S, Yu Z, Yan S, Zhou X, Zhang L (2010) Electrical and ferromagnetic properties of Tb-doped indium–tin oxide films fabricated by sol–gel method. Appl Surf Sci 256:6013–6017 Zuo Y, Ge S, Yu Z, Yan S, Zhou X, Zhang L (2010) Electrical and ferromagnetic properties of Tb-doped indium–tin oxide films fabricated by sol–gel method. Appl Surf Sci 256:6013–6017
Metadaten
Titel
Electrical properties of nano-sized indium tin oxide (ITO) doped with CuO, Cr2O3 and ZrO2
verfasst von
H. A. Abbas
A. M. Youssef
F. F. Hammad
A. M. A. Hassan
Z. M. Hanafi
Publikationsdatum
01.08.2014
Verlag
Springer Netherlands
Erschienen in
Journal of Nanoparticle Research / Ausgabe 8/2014
Print ISSN: 1388-0764
Elektronische ISSN: 1572-896X
DOI
https://doi.org/10.1007/s11051-014-2518-8

Weitere Artikel der Ausgabe 8/2014

Journal of Nanoparticle Research 8/2014 Zur Ausgabe

    Marktübersichten

    Die im Laufe eines Jahres in der „adhäsion“ veröffentlichten Marktübersichten helfen Anwendern verschiedenster Branchen, sich einen gezielten Überblick über Lieferantenangebote zu verschaffen.