Electrode Array for Neural Interfaces

A neural interface is a kind of device or system which is used to connect neural system with external equipment, through recording electroneurographic (EEG) signals, a neural interface monitors or stimulates and regulates neural activities. To reduce as much as possible the interference of the device in neural system, neural interfaces are usually fabricated with MEMs technology, which helps to minimize the dimensions of neural interfaces. Apart from meeting the dimension requirements, neural interfaces should also be biocompatible in terms of biochemical characteristics, electrical properties, and mechanical properties. These requirements or limits mean more challenges upon neural interface materials and processing technologies. In this chapter, we will take implantable neural microelectrode array as an example, and introduce the development of existing microfabrication technology including working principle, material selection, structure, and manufacturing process of neural microelectrode device. At last, we will sum up the problems and challenges microelectrode devices are facing.