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Erschienen in:
20.08.2015
Embedded thin film resistors fabricated by alkaline electroless deposition
Erschienen in: Journal of Materials Science: Materials in Electronics | Ausgabe 12/2015
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Abstract
This paper explores the fabrication of embedded resistor materials by acidic and alkaline electroless Ni–P deposition methods. The influences of different reaction parameters on deposition rate and Ni–P layer property are discussed. The alkaline deposition is more favored to fabricate embedded resistors for its better manufacturing controllability and layer corrosion resistance. Process capability is further assessed by fabricating resistors of different patterns. Relative standard deviation (RSD) of the square resistances is found decreasing with the resistor pattern, and can be controlled within applicable range without laser trimming. Furthermore, the fabricated embedded resistors can endure standard environmental reliability tests, which making them potential materials in printed circuit board manufacturing.