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2018 | OriginalPaper | Chapter

A Micromachined Silicon Resonant Pressure Sensor

Authors : Junbo Wang, Deyong Chen, Bo Xie, Jian Chen, Lin Zhu, Yulan Lu

Published in: Micro Electro Mechanical Systems

Publisher: Springer Singapore

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Abstract

Micromachined silicon resonant pressure sensors have been widely used in automotive industry, medical instrument, aerospace, and military fields due to their high accuracy, long-term stability, and quasi-digital output. This chapter begins with the introduction of the working principle of the resonant pressure sensors, illustrating key relationships between (1) intrinsic resonant frequency and structural parameters, (2) pressure under measurement and resonant frequency shift, and (3) device sensitivity and structural parameters. Then, two kinds of micromachined silicon resonant pressure sensors based on electromagnetic and electrostatic excitations are presented, respectively, where device design, simulation, fabrication, and packaging are discussed in details. Finally, self-temperature compensation approaches are introduced to improve the performance of the micromachined silicon resonant pressure sensors, which can therefore function in a wide temperature range.

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Title: A Micromachined Silicon Resonant Pressure Sensor
Authors: Junbo Wang
Deyong Chen
Bo Xie
Jian Chen
Lin Zhu
Yulan Lu
Publisher: Springer Singapore
Book: Micro Electro Mechanical Systems
Print ISBN: 978-981-10-5944-5

Electronic ISBN: 978-981-10-5945-2

Copyright Year: 2018
DOI: https://doi.org/10.1007/978-981-10-5945-2_15