2006 | OriginalPaper | Chapter
Boron Nitride Thin Layers Prepared Using a Krypton Fluoride Excimer Laser
Authors : Robert Kosydar, Waldemar Mroz, Miroslav Jelinek, Thomas Kocourek
Published in: Functional Properties of Nanostructured Materials
Publisher: Springer Netherlands
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Boron nitride thin layers were fabricated by the pulsed laser deposition technique using a KrF excimer laser. In order to improve stoichiometry, a radio frequency discharge generator was additionally applied.