Skip to main content
Top
Published in: Microsystem Technologies 3/2016

18-12-2014 | Technical Paper

Bulk metallic glass mold for high volume fabrication of micro optics

Authors: Peng He, Likai Li, Fei Wang, Olaf Dambon, Fritz Klocke, Katharine M. Flores, Allen Y. Yi

Published in: Microsystem Technologies | Issue 3/2016

Log in

Activate our intelligent search to find suitable subject content or patents.

search-config
loading …

Abstract

Suitable mold materials are critical for successful high volume replication of micro optical components. As one of the emerging new materials, bulk metallic glass (BMG) can serve as high-quality mold material to overcome the existing changelings with current mold materials. Zr-based BMG does not have the intrinsic structural defects and can be precisely formed into desired shape at elevated temperature. Therefore, the unique combination of good forming ability at elevated temperature and sufficient strength at working temperature make it perfect as high quality mold material for optics fabrication. This paper investigated the fabrication and use of BMG mold inserts to create micro optics on polymethylmethacrylate (PMMA) substrate. BMG mold inserts were replicated from a fused silica master mold using precision glass molding techniques. The molded BMG inserts with optical features were used next as secondary molds to manufacture of polymer micro optics. High volume production methods, i.e., hot embossing and injection molding, are investigated. In order to evaluate the performance of BMG inserts, the geometry of the gratings on PMMA part were verified with fused silica master mold and BMG inserts using a non-contact profilometer. In addition, an instrument designed to measure surface scattering was used to measure the light distribution from the gratings. By using this process, high performance and BMG mold inserts for hot embossing and injection molding can be prepared cost-effectively for high volume production of plastic micro optical components.

Dont have a licence yet? Then find out more about our products and how to get one now:

Springer Professional "Wirtschaft+Technik"

Online-Abonnement

Mit Springer Professional "Wirtschaft+Technik" erhalten Sie Zugriff auf:

  • über 102.000 Bücher
  • über 537 Zeitschriften

aus folgenden Fachgebieten:

  • Automobil + Motoren
  • Bauwesen + Immobilien
  • Business IT + Informatik
  • Elektrotechnik + Elektronik
  • Energie + Nachhaltigkeit
  • Finance + Banking
  • Management + Führung
  • Marketing + Vertrieb
  • Maschinenbau + Werkstoffe
  • Versicherung + Risiko

Jetzt Wissensvorsprung sichern!

Springer Professional "Technik"

Online-Abonnement

Mit Springer Professional "Technik" erhalten Sie Zugriff auf:

  • über 67.000 Bücher
  • über 390 Zeitschriften

aus folgenden Fachgebieten:

  • Automobil + Motoren
  • Bauwesen + Immobilien
  • Business IT + Informatik
  • Elektrotechnik + Elektronik
  • Energie + Nachhaltigkeit
  • Maschinenbau + Werkstoffe




 

Jetzt Wissensvorsprung sichern!

Literature
go back to reference Chen Y, Yi AY, Su L et al (2008) Numerical simulation and experimental study of residual stresses in compression molding of precision glass optical components. J Manuf Sci Eng 130:051012–051019. doi:10.1115/1.2950062 CrossRef Chen Y, Yi AY, Su L et al (2008) Numerical simulation and experimental study of residual stresses in compression molding of precision glass optical components. J Manuf Sci Eng 130:051012–051019. doi:10.​1115/​1.​2950062 CrossRef
go back to reference Li Z (2013) On-chip optofluidic grating spectrograph for biomedical applications. p 88450P–88450P–6 Li Z (2013) On-chip optofluidic grating spectrograph for biomedical applications. p 88450P–88450P–6
go back to reference Yi AY, Chen Y, Klocke F et al (2006) A high volume precision compression molding process of glass diffractive optics by use of a micromachined fused silica wafer mold and low Tg optical glass. J Micromech Microeng 16:2000–2005. doi:10.1088/0960-1317/16/10/012 CrossRef Yi AY, Chen Y, Klocke F et al (2006) A high volume precision compression molding process of glass diffractive optics by use of a micromachined fused silica wafer mold and low Tg optical glass. J Micromech Microeng 16:2000–2005. doi:10.​1088/​0960-1317/​16/​10/​012 CrossRef
Metadata
Title
Bulk metallic glass mold for high volume fabrication of micro optics
Authors
Peng He
Likai Li
Fei Wang
Olaf Dambon
Fritz Klocke
Katharine M. Flores
Allen Y. Yi
Publication date
18-12-2014
Publisher
Springer Berlin Heidelberg
Published in
Microsystem Technologies / Issue 3/2016
Print ISSN: 0946-7076
Electronic ISSN: 1432-1858
DOI
https://doi.org/10.1007/s00542-014-2395-1

Other articles of this Issue 3/2016

Microsystem Technologies 3/2016 Go to the issue