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2018 | OriginalPaper | Chapter

4. CMOS Multimodal Sensor Array for Biomedical Sensing

Author : Kazuo Nakazato

Published in: CMOS Circuits for Biological Sensing and Processing

Publisher: Springer International Publishing

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Abstract

Multimodal sensor arrays with potentiometric, amperometric, impedimetric, and photometric sensors have been designed and fabricated by standard CMOS process and post-CMOS process to form gold electrodes and microfluidics. Three types of sensor arrays, 64 × 64 potentiometric and photometric sensor array, 64 × 64 ASSP (application-specific standard product) sensor array, and 512 × 512 high-density sensor array, are implemented in 7 × 7.5 mm² chip and total power consumption 10 mW using 0.6 μm CMOS technology. In potentiometric and photometric sensor array, electric potential is sensed and outputted as an analog signal by a cascode source-drain follower, and photocurrent is converted to digital signal by current-mode ADC (analog-to-digital converter). In ASSP sensor array, potentiometric, amperometric, impedimetric, and photometric sensors output electric currents which are processed by current mixers and current-mode ADCs in array peripheral circuits. In high-density sensor array, submicron gold electrodes are formed by electroless plating. These sensors are applied to enzyme sensor with redox mediator and counting bacteria/viruses one by one. Stand-alone portable diagnostic inspection system is constructed with 18 × 10 × 5.5 cm³ and 850 g. Power is 5 V 220 mA supplied from USB adapter.

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Title: CMOS Multimodal Sensor Array for Biomedical Sensing
Author: Kazuo Nakazato
Publisher: Springer International Publishing
Book: CMOS Circuits for Biological Sensing and Processing
Print ISBN: 978-3-319-67722-4

Electronic ISBN: 978-3-319-67723-1

Copyright Year: 2018
DOI: https://doi.org/10.1007/978-3-319-67723-1_4