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Microsystem Technologies
Published in: Microsystem Technologies 8/2013

01-08-2013 | Technical Paper

Continuously tunable terahertz metamaterial employing a thermal actuator

Authors: Xiuhan Li, Tianyang Yang, Wangqiang Zhu, Xiaoguang Li

Published in: Microsystem Technologies | Issue 8/2013

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Abstract

In order to increase the flexibility of the resonance frequency, a widely and continuously tunable terahertz metamaterial structure that employs a thermal actuator for tuning the resonance frequency of a two-cut split-ring resonator is proposed in this paper. The tunable metamaterial device model is designed and simulated based on the MetalMUMPs process. The use of V-shaped thermal actuators enables continuous tuning of the resonance frequency over a large range from 1.374 to 1.574 THz. The transmission curves have a sharp dip in every resonance frequency, which indicates an excellent performance of strong resonance. The geometrical parameters of the V-shaped thermal actuator are optimized by COMSOL Multiphysics 4.2 in order to obtain enough displacement under minimum driven current. The relationship between driven current and slabs’ displacement is also characterized. The reliability of the metamaterial structure array actuated by the thermal actuator is also calculated and discussed.
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Literature
Alves F, Grbovic D, Kearney B, Karunasiri G (2012) Microelectromechanical systems bimaterial terahertz sensor with integrated metamaterial absorber. Opt Lett 37(11):1886–1888CrossRef
Baena JD, Bonache J, Martín F, Sillero RM, Falcone F, Lopetegi T, Laso MAG, García- García J, Gil I, Portillo MF, Sorolla M (2005) Equivalent-circuit models for split-ring resonators and complementary split-ring resonators coupled to planar transmission lines. IEEE Trans Microw Theory Tech 53(4):1451–1461CrossRef
Bouyge D, Mardivirin D, Bonache J, Crunteanu A, Pothier A, Sindreu MD, Blondy P, Martin F (2011) Split ring resonators (SRRs) based on micro-electro-mechanical deflectable cantilever-type rings: application to tunable stopband filters. IEEE Microw Wirel Co 21(5):243–245CrossRef
Chen HT, Padilla WJ, Zide JMO, Gossard AC, Taylor AJ, Averitt RD (2006) Active terahertz metamaterial devices. Nature 444:597–600CrossRef
Chen HT, O’Hara JF, Taylor AJ, Averitt RD, Highstrete C, Lee M, Padilla WJ (2007) Complementary planar terahertz metamaterials. Opt Express 15(3):1084–1095CrossRef
Debus C, Bolivar PH (2007) Frequency selective surfaces for high sensitivity terahertz sensing. Appl Phys Lett 91(18):184102CrossRef
Fang N, Lee H, Sun C, Zhang X (2005) Sub-diffraction-limited optical imaging with a silver superlens. Science 308(5721):534–537CrossRef
Girbau D, Pradell L, Lázaro A, Nebot À (2006) In-plane electrostatically-actuated RF MEMS switch suspended on a low-resistivity substrate. Presented at European Microwave Integrated Circuits Conference, Manchester, 10–13 Sept. 2006, pp 505–508
Girbau D, Pradell L, Lázaro A, Nebot À (2007) Electrothermally actuated RF MEMS switches suspended on a low-resistivity substrate. J Microelectromech Syst 16:1061–1070CrossRef
Kawase K, Ogawa Y, Watanabe Y (2003) Non-destructive terahertz imaging of illicit drugs using spectral fingerprints. Opt Express 11:2549–2554CrossRef
Kersting R, Strasser G, Unterrainer K (2002) Terahertz phase modulator. Electron Lett 36(13):1156–1158CrossRef
Knobloch P, Schildknecht C, Kleine-Ostmann T, Koch M, Hoffmann S, Hofmann M, Rehberg E, Sperling M, Donhuijsen K, Hein G, Pierz K (2002) Medical THz imaging: an investigation of histo-pathological samples. Phys Med Biol 47:3875. doi:10.​1088/​0031-9155/​47/​21/​327 CrossRef
Němec H, Kužel P, Kadlec F, Kadlec C, Yahiaoui R, Mounaix P (2009) Tunable terahertz metamaterials with negative permeability. Phys Rev B 79(24):2411081–2411084
Ozbey B, Aktas O (2011) Continuously tunable terahertz metamaterial employing magnetically actuated cantilevers. Opt Express 19(7):5741–5751CrossRef
Pendry JB, Holden AJ, Robbins DJ, Stewart WJ (1999) Magnetism from conductors and enhanced nonlinear phenomena. IEEE Trans Microw Theory Tech 47(11):2075–2084CrossRef
Piesiewicz R, Ostmann TK, Mittleman D, Koch M, Krumbholz JS, Kurner T (2007) Short-range ultra-broadband terahertz communications: concepts and perspectives. IEEE Antenn Propag M 49(6):24–39CrossRef
Shelby RA, Smith DR, Schultz S (2001) Experimental verification of a negative index of refraction. Science 292(5514):77–79CrossRef
Siegel PH (2002) Terahertz technology. IEEE Trans Microw Theory Tech 50(3):910–928CrossRef
Singh R, Azad AK, Jia QX, Taylor AJ, Chen HT (2011) Thermal tunability in terahertz metamaterials fabricated on strontium titanate single-crystal substrates. Opt Lett 36(7):1230–1232CrossRef
Tao H (2010) MEMS enhanced metamaterials: towards filling the terahertz gap. Doctor of Philosophy, Boston University
Tao H, Strikwerda AC, Fan K, Padilla WJ, Zhang X (2009) Reconfigurable terahertz metamaterials. Phys Rev Lett 103(14):147401CrossRef
Withayachumnankul W, Abbott D (2009) Metamaterials in the terahertz regime. IEEE Photon J 1(2):99–118CrossRef
Zhang W, Zhu WM (2011) A THz dual mode switch using MEMS switchable metamaterial. Micro Electro Mechanical Systems (MEMS) In: IEEE 24th International Conference, Cancun, January 23–27 2011, pp 672–675
Metadata
Title
Continuously tunable terahertz metamaterial employing a thermal actuator
Authors
Xiuhan Li
Tianyang Yang
Wangqiang Zhu
Xiaoguang Li
Publication date
01-08-2013
Publisher
Springer Berlin Heidelberg
Published in
Microsystem Technologies / Issue 8/2013
Print ISSN: 0946-7076
Electronic ISSN: 1432-1858
DOI
https://doi.org/10.1007/s00542-012-1713-8

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