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Published in: Journal of Materials Science: Materials in Electronics 5/2017

16-11-2016

Dependence of the optoelectronic properties of Se-doped silicon on the thickness of dopant film

Authors: Fei Tang, Zhiming Wu, Lingyan Du, Rui Li, Yadong Jiang

Published in: Journal of Materials Science: Materials in Electronics | Issue 5/2017

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Abstract

Se doped silicon is prepared by femtosecond-laser irradiation of Si coated with Si/Se bilayer films. The effects of Se film thickness on optical and electrical properties of Se doped silicon are studied. With the increase of the thickness of dopant film, the infrared absorptance increases significantly at wavelengths from 1100 to 2200 nm. At −10 V bias, the responsivities at 1064 nm for samples prepared with Se film thicknesses of 50, 75, 100 and 125 nm are 0.310, 0.786, 0.911 and 1.22 A/W, respectively. This investigation demonstrates that the increase of doping concentration is beneficial to improve infrared absorption and photoresponse of Se doped silicon. This observation has potential to improve the property of Se doped silicon and facilitate its application in photoelectric devices.

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Literature
1.
go back to reference G. Masini, L. Colace, G. Assanto, Si based optoelectronics for communications. Mater. Sci. Eng. B 89, 2–9 (2002)CrossRef G. Masini, L. Colace, G. Assanto, Si based optoelectronics for communications. Mater. Sci. Eng. B 89, 2–9 (2002)CrossRef
2.
go back to reference P.R. Chidambaram, C. Bowen, S. Chakravarthi, C. Machala, R. Wise, Fundamentals of silicon material properties for successful exploitation of strain engineering in modern CMOS manufacturing. IEEE Trans. Electron Devices 53(5), 944–964 (2006)CrossRef P.R. Chidambaram, C. Bowen, S. Chakravarthi, C. Machala, R. Wise, Fundamentals of silicon material properties for successful exploitation of strain engineering in modern CMOS manufacturing. IEEE Trans. Electron Devices 53(5), 944–964 (2006)CrossRef
3.
go back to reference A. Bahari, M. Roeinfard, A. Ramzannezhad, Characteristics of Fe3O4/ZnO nanocomposite as a possible gate dielectric of nanoscale transistors in the field of cyborg. J. Mater. Sci. El. 27(9), 9363–9369 (2016)CrossRef A. Bahari, M. Roeinfard, A. Ramzannezhad, Characteristics of Fe3O4/ZnO nanocomposite as a possible gate dielectric of nanoscale transistors in the field of cyborg. J. Mater. Sci. El. 27(9), 9363–9369 (2016)CrossRef
4.
go back to reference M. Shahbazi, A. Bahari, S. Ghasemi, Structural and frequency-dependent dielectric properties of PVP-SiO2-TMSPM hybrid thin films. Org. Electron. 32, 100–108 (2016)CrossRef M. Shahbazi, A. Bahari, S. Ghasemi, Structural and frequency-dependent dielectric properties of PVP-SiO2-TMSPM hybrid thin films. Org. Electron. 32, 100–108 (2016)CrossRef
5.
go back to reference C.H. Crouch, J.E. Carey, M. Shen, E. Mazur, F.Y. Génin, Infrared absorption by sulfur-doped silicon formed by femtosecond laser irradiation. Appl. Phys. A 79(7), 1635–1641 (2004)CrossRef C.H. Crouch, J.E. Carey, M. Shen, E. Mazur, F.Y. Génin, Infrared absorption by sulfur-doped silicon formed by femtosecond laser irradiation. Appl. Phys. A 79(7), 1635–1641 (2004)CrossRef
6.
go back to reference J.E. Carey, C.H. Crouch, M. Shen, E. Mazur, Visible and near-infrared responsivity of femtosecond-laser microstructured silicon photodiodes. Opt. Lett. 30(14), 1773–1775 (2005)CrossRef J.E. Carey, C.H. Crouch, M. Shen, E. Mazur, Visible and near-infrared responsivity of femtosecond-laser microstructured silicon photodiodes. Opt. Lett. 30(14), 1773–1775 (2005)CrossRef
7.
go back to reference A.J. Said, D. Recht, J.T. Sullivan, J.M. Warrender, T. Buonassisi, P.D. Persans, M.J. Aziz, Extended infrared photoresponse and gain in chalcogen-supersaturated silicon photodiodes. Appl. Phys. Lett. 99(7), 073503 (2011)CrossRef A.J. Said, D. Recht, J.T. Sullivan, J.M. Warrender, T. Buonassisi, P.D. Persans, M.J. Aziz, Extended infrared photoresponse and gain in chalcogen-supersaturated silicon photodiodes. Appl. Phys. Lett. 99(7), 073503 (2011)CrossRef
8.
go back to reference M.A. Sheehy, L. Winston, J.E. Carey, C.M. Friend, E. Mazur, Role of the background gas in the morphology and optical properties of laser-microstructured silicon. Chem. Mater. 17(14), 3582–3586 (2005)CrossRef M.A. Sheehy, L. Winston, J.E. Carey, C.M. Friend, E. Mazur, Role of the background gas in the morphology and optical properties of laser-microstructured silicon. Chem. Mater. 17(14), 3582–3586 (2005)CrossRef
9.
go back to reference R. Younkin, J.E. Carey, E. Mazur, J.A. Levinson, C.M. Friend, Infrared absorption by conical silicon microstructures made in a variety of background gases using femtosecond-laser pulses. J. Appl. Phys. 93, 2626–2629 (2003)CrossRef R. Younkin, J.E. Carey, E. Mazur, J.A. Levinson, C.M. Friend, Infrared absorption by conical silicon microstructures made in a variety of background gases using femtosecond-laser pulses. J. Appl. Phys. 93, 2626–2629 (2003)CrossRef
10.
go back to reference M.J. Sher, Y.T. Lin, M.T. Winkler, E. Mazur, C. Pruner, A. Asenbaum, Mid-infrared absorptance of silicon hyperdoped with chalcogen via fs-laser irradiation. J. Appl. Phys. 113(6), 063520 (2013)CrossRef M.J. Sher, Y.T. Lin, M.T. Winkler, E. Mazur, C. Pruner, A. Asenbaum, Mid-infrared absorptance of silicon hyperdoped with chalcogen via fs-laser irradiation. J. Appl. Phys. 113(6), 063520 (2013)CrossRef
11.
go back to reference X. Wang, Y. Huang, D. Lu, X. Zhu, H. Zhu, High response in a tellurium-supersaturated silicon photodiode. Chin. Phys. Lett. 30(3), 036101 (2013)CrossRef X. Wang, Y. Huang, D. Lu, X. Zhu, H. Zhu, High response in a tellurium-supersaturated silicon photodiode. Chin. Phys. Lett. 30(3), 036101 (2013)CrossRef
12.
go back to reference M.J. Smith, M. Sher, B. Franta, Y. Lin, E. Mazur, S. Gradecak, Improving dopant incorporation during femtosecond-laser doping of Si with a Se thin-film dopant precursor. Appl. Phys. A 114(4), 1009–1016 (2014)CrossRef M.J. Smith, M. Sher, B. Franta, Y. Lin, E. Mazur, S. Gradecak, Improving dopant incorporation during femtosecond-laser doping of Si with a Se thin-film dopant precursor. Appl. Phys. A 114(4), 1009–1016 (2014)CrossRef
13.
go back to reference M.J. Smith, M.T. Winkler, M. Sher, Y. Lin, E. Mazur, S. Gradecak, The effects of a thin film dopant precursor on the structure and properties of femtosecond-laser irradiated silicon. Appl. Phys. A 105(4), 795–800 (2011)CrossRef M.J. Smith, M.T. Winkler, M. Sher, Y. Lin, E. Mazur, S. Gradecak, The effects of a thin film dopant precursor on the structure and properties of femtosecond-laser irradiated silicon. Appl. Phys. A 105(4), 795–800 (2011)CrossRef
14.
go back to reference M.A. Sheehy, B.R. Tull, C.M. Friend, E. Mazur, Chalcogen doping of silicon via intense femtosecond-laser irradiation. Mater. Sci. Eng. B 137(1), 289–294 (2007)CrossRef M.A. Sheehy, B.R. Tull, C.M. Friend, E. Mazur, Chalcogen doping of silicon via intense femtosecond-laser irradiation. Mater. Sci. Eng. B 137(1), 289–294 (2007)CrossRef
15.
go back to reference L. Du, Z. Wu, R. Li, F. Tang, Y. Jiang, Near-infrared photoresponse of femtosecond-laser processed Se-doped silicon n+–n photodiodes. Opt. Lett. 41(21), 5031–5034 (2016)CrossRef L. Du, Z. Wu, R. Li, F. Tang, Y. Jiang, Near-infrared photoresponse of femtosecond-laser processed Se-doped silicon n+–n photodiodes. Opt. Lett. 41(21), 5031–5034 (2016)CrossRef
16.
go back to reference B.R. Tull, M.T. Winkler, E. Mazur, The role of diffusion in broadband infrared absorption in chalcogen-doped silicon. Appl. Phys. A 96(2), 327–334 (2009)CrossRef B.R. Tull, M.T. Winkler, E. Mazur, The role of diffusion in broadband infrared absorption in chalcogen-doped silicon. Appl. Phys. A 96(2), 327–334 (2009)CrossRef
17.
go back to reference X. Li, L. Chang, R. Qiu, C. Wan, Z. Li, S. Hu, Microstructuring and doping of silicon with nanosecond laser pulses. Appl. Surf. Sci. 258(20), 8002–8007 (2012)CrossRef X. Li, L. Chang, R. Qiu, C. Wan, Z. Li, S. Hu, Microstructuring and doping of silicon with nanosecond laser pulses. Appl. Surf. Sci. 258(20), 8002–8007 (2012)CrossRef
18.
go back to reference L. Du, Z. Wu, Y. Su, R. Li, F. Tang, S. Li, Y. Jiang, Se doping of silicon with Si/Se bilayer films prepared by femtosecond-laser irradiation. Mat. Sci. Semicond. Proc. 54, 51–56 (2016)CrossRef L. Du, Z. Wu, Y. Su, R. Li, F. Tang, S. Li, Y. Jiang, Se doping of silicon with Si/Se bilayer films prepared by femtosecond-laser irradiation. Mat. Sci. Semicond. Proc. 54, 51–56 (2016)CrossRef
19.
go back to reference C. Wu, C.H. Crouch, L. Zhao, J.E. Carey, R. Younkin, J.A. Levinson, E. Mazur, R.M. Farrell, P. Gothoskar, A. Karger, Near-unity below-band-gap absorption by microstructured silicon. Appl. Phys. Lett. 78(13), 1850–1852 (2001)CrossRef C. Wu, C.H. Crouch, L. Zhao, J.E. Carey, R. Younkin, J.A. Levinson, E. Mazur, R.M. Farrell, P. Gothoskar, A. Karger, Near-unity below-band-gap absorption by microstructured silicon. Appl. Phys. Lett. 78(13), 1850–1852 (2001)CrossRef
20.
go back to reference L. Du, Z. Wu, S. Li, Z. Hu, Y. Jiang, First-principles calculations of properties for chalcogen (S, Se, Te) doped silicon. Solid State Commun. 226, 1–4 (2016)CrossRef L. Du, Z. Wu, S. Li, Z. Hu, Y. Jiang, First-principles calculations of properties for chalcogen (S, Se, Te) doped silicon. Solid State Commun. 226, 1–4 (2016)CrossRef
21.
go back to reference J. Zhao, C. Li, Q. Chen, H. Sun, Femtosecond laser direct writing assisted nonequilibriumly doped silicon n+-p photodiodes for light sensing. IEEE Sens. J. 15(8), 4259–4263 (2015)CrossRef J. Zhao, C. Li, Q. Chen, H. Sun, Femtosecond laser direct writing assisted nonequilibriumly doped silicon n+-p photodiodes for light sensing. IEEE Sens. J. 15(8), 4259–4263 (2015)CrossRef
Metadata
Title
Dependence of the optoelectronic properties of Se-doped silicon on the thickness of dopant film
Authors
Fei Tang
Zhiming Wu
Lingyan Du
Rui Li
Yadong Jiang
Publication date
16-11-2016
Publisher
Springer US
Published in
Journal of Materials Science: Materials in Electronics / Issue 5/2017
Print ISSN: 0957-4522
Electronic ISSN: 1573-482X
DOI
https://doi.org/10.1007/s10854-016-6026-8

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