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2017 | OriginalPaper | Chapter

Design and Analytical Studies of a DLC Thin-Film Piezoresistive Pressure Microsensor

Authors : Luiz Antonio Rasia, Gabriela Leal, Leandro Léo Koberstein, Humber Furlan, Marcos Massi, Mariana Amorim Fraga

Published in: Applied Computer Sciences in Engineering

Publisher: Springer International Publishing

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Abstract

Diamond-like carbon (DLC) thin films have been investigated for a wide range of applications due to their excellent electrical and mechanical properties. In the last decade, several researches and development activities have been conducted on the use of these thin films as piezoresistors in MEMS pressure sensors. This paper provides an overview on the design of a piezoresistive pressure sensor constituted of a silicon circular diaphragm with four DLC thin-film piezoresistors arranged in the Wheatstone bridge configuration. The sensor was designed from analytical formulas found in the literature.

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Metadata
Title
Design and Analytical Studies of a DLC Thin-Film Piezoresistive Pressure Microsensor
Authors
Luiz Antonio Rasia
Gabriela Leal
Leandro Léo Koberstein
Humber Furlan
Marcos Massi
Mariana Amorim Fraga
Copyright Year
2017
Book
Applied Computer Sciences in Engineering

Print ISBN: 978-3-319-66962-5

Electronic ISBN: 978-3-319-66963-2

Copyright Year: 2017

DOI
https://doi.org/10.1007/978-3-319-66963-2_39

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