Design and optimization based on uncertainty analysis in electro-thermal excited MEMS resonant sensor

A vibration model of double-clamped resonant beam that is driven by electro-thermal excitation for a MEMS resonant sensor is established. The sample-based stochastic model is established to investigate the influence of different uncertain structure size and excitation parameters on sensor performance. Effects of uncertainty distributions of structure size and excitation voltage due to fabricating or control errors on sensor performance, including nature frequency F _rn , quality factor per unit amplitude Q _amp , and the detecting sensitivity S _p , are studied. The results can be used as references for design and optimization of the structure size and excitation parameters of electro-thermal excited MEMS resonant sensor.