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Microsystem Technologies

Design and performance analysis of ohmic contact based SPMT RF MEMS switch

  • 15-07-2023
  • Technical Paper
Published in:
Authors
K. Rajasekhar
K. GirijaSravani
K. Srinivasa Rao
Published in
Microsystem Technologies | Issue 9/2023

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Abstract

The article delves into the design and performance analysis of an ohmic contact-based SPMT RF MEMS switch, addressing the limitations of conventional solid-state switches. It introduces a thermal buckle-beam design that efficiently converts thermal deformation into lateral displacement, ensuring constant electrode distance and minimal pull-in voltage changes across a wide temperature range. The study also presents a comprehensive analysis of the switch's performance, including RF properties, isolation, and insertion losses. Additionally, it explores the integration of the switch into a SPMT configuration for wireless communication applications, highlighting its potential for high-frequency and wideband applications. The article concludes with a comparison of the proposed switch with existing literature, showcasing its superior performance in terms of actuation voltage, switching time, and isolation.
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Title
Design and performance analysis of ohmic contact based SPMT RF MEMS switch
Authors
K. Rajasekhar
K. GirijaSravani
K. Srinivasa Rao
Publication date
15-07-2023
Publisher
Springer Berlin Heidelberg
Published in
Microsystem Technologies / Issue 9/2023
Print ISSN: 0946-7076
Electronic ISSN: 1432-1858
DOI
https://doi.org/10.1007/s00542-023-05503-z
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