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An Interactive Smart Mirror Using Internet of Things and Machine Learning Read chapter Read first chapter

2022 | OriginalPaper | Chapter

Design and Simulation of MEMS Based Capacitive Accelerometer

Authors : S. Veena, Newton Rai, Amogh Manjunath Rao Morey, H. L. Suresh, Habibuddin Shaik

Published in: IoT and Analytics for Sensor Networks

Publisher: Springer Singapore

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Abstract

Accelerometer is an electromechanical device, which is used for physical measurement along the orthogonal coordinates. Micro Electro Mechanical Systems (MEMS) based capacitive accelerometers are embedded in many modern technological applications. This paper presents the comparison between two single axis MEMS based capacitive accelerometers, which have the natural frequencies of 7 and 2.2 kHz. This work includes design, simulation, analytical modelling, and finite element modelling of each MEMS comb type capacitive accelerometer with different operating frequencies. The accelerometer was designed using COMSOL Multiphysics and MATLAB simulator tool.

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Metadata
Title
Design and Simulation of MEMS Based Capacitive Accelerometer
Authors
S. Veena
Newton Rai
Amogh Manjunath Rao Morey
H. L. Suresh
Habibuddin Shaik
Copyright Year
2022
Publisher
Springer Singapore
Book
IoT and Analytics for Sensor Networks

Print ISBN: 978-981-16-2918-1

Electronic ISBN: 978-981-16-2919-8

Copyright Year: 2022

DOI
https://doi.org/10.1007/978-981-16-2919-8_19