2012 | OriginalPaper | Chapter
Design, Fabrication and Testing of Assembly Features for Enabling Sub-micron Accurate Passive Alignment of Photonic Chips on a Silicon Optical Bench
Authors : J. F. C. van Gurp, Marcel Tichem, U. Staufer
Published in: Precision Assembly Technologies and Systems
Publisher: Springer Berlin Heidelberg
Activate our intelligent search to find suitable subject content or patents.
Select sections of text to find matching patents with Artificial Intelligence. powered by
Select sections of text to find additional relevant content using AI-assisted search. powered by
In this paper, we report on passive alignment with sub-micron precision of two photonic chips on a silicon optical bench. An effective design principle to minimize the tolerance chain is presented and applied to a case study. The chips have been successfully manufactured and individual characterization of the chips revealed that all critical dimensions were within or close to specs. Sub-pixel analysis of images of assembled chips showed that a repeatability of 0.3
μ
m from a single photonic chip to the silicon optical bench can be achieved. Moreover, it was demonstrated that passive alignment features defined in the waveguiding layers are robust enough to function as mechanical endstops.